Fabrication of 5 nm resolution electrodes for molecular devices by means of electron beam lithography
- Author
- DI FABRIZIO, E1 ; GRELLA, L1 ; GENTILI, M1 ; BACIOCCHI, M1 ; MASTROGIACOMO, L1 ; MORALES, P2
[1] Istituto di Electronica dello Stato Solido-CNR Via Cineto Romano 42, 00156 Rome, Italy
[2] ENEA, Centro Ricerche della Casaccia, P.O. Box 2400, 00100 Rome, Italy - Source
Japanese journal of applied physics. 1997, Vol 36, Num 1AB, pp L70-L72 ; 2 ; ref : 8 ref
- CODEN
- JJAPA5
- ISSN
- 0021-4922
- Scientific domain
- Crystallography; Optics; Condensed state physics; Physics; Plasma physics
- Publisher
- Japanese journal of applied physics, Tokyo
- Publication country
- Japan
- Document type
- Article
- Language
- English
- Keyword (fr)
- Adhérence Electronique moléculaire Etude expérimentale Fabrication Lithographie faisceau électron Méthacrylate de méthyle polymère Redresseur Resist Pointe électrode
- Keyword (en)
- Adhesion Molecular electronics Experimental study Manufacturing Electron beam lithography Methyl methacrylate polymer Rectifier Resist
- Keyword (es)
- Adherencia Electrónica molecular Estudio experimental Fabricación Litografía haz electrón Metacrilato de metilo polímero Rectificador Resistencia
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F18 Molecular electronics, nanoelectronics
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2575822
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1143/JJAP.36.L70 
https://dx.doi.org/10.1143/JJAP.36.L70
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