Modeling and Characterization of Cantilever-Based MEMS Piezoelectric Sensors and Actuators
- Author
- LITTRELL, Robert1 2 ; GROSH, Karl1 2
[1] University of Michigan, Ann Arbor, MI 48109, United States
[2] Baker-Calling, Inc., Ann Arbor, MI 48105, United States - Source
Journal of microelectromechanical systems. 2012, Vol 21, Num 2, pp 406-413, 8 p ; ref : 24 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Accelerometer cantilever energy harvesting microphone piezoelectric small piezoelectric coupling
- Keyword (fr)
- Accéléromètre Actionneur Capteur accélération Capteur mesure Constante piézoélectrique Dispositif microélectromécanique Etude expérimentale Microphone Modélisation Nitrure d'aluminium Piézoélectricité Piézoélectrique Poutre cantilever Récupération énergie Système contrôle commande
- Keyword (en)
- Accelerometers Actuators Acceleration sensor Measurement sensor Piezoelectric constant Microelectromechanical device Experimental study Microphones Modelling Aluminium nitride Piezoelectricity Piezoelectric materials Cantilever beam Energy recovery Command and control systems
- Keyword (es)
- Sensor acceleración Captador medida Constante piezoeléctrica Dispositivo microelectromecánico Aluminio nitruro Piezoeléctrica Viga cantilever
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07M Transducers
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 25768120
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/JMEMS.2011.2174419 
https://dx.doi.org/10.1109/JMEMS.2011.2174419
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