Influence of rapid thermal annealing on surface texture-etched Al-doped ZnO films prepared by various magnetron sputtering methods
- Author
- MINAMI, Tadatsugu1 ; HIRANO, Tomoyasu1 ; MIYATA, Toshihiro1 ; NOMOTO, Jun-Ichi1
[1] Optoelectronic Device System R&D Center, Kanazawa Institute of Technology, 7-1 Ohgigaoka, Nonoichi, Ishikawa 921-8501, Japan - Conference title
- 7th International Symposium on Transparent Oxide Thin Films for Electronics and Optics (TOEO-7)
- Conference name
- TOEO-7 International Symposium on Transparent Oxide Thin Films for Electronics and Optics (7 ; Tokyo 2011-03-14)
- Author (monograph)
- HOSONO, Hideo (Editor)1 ; GINLEY, David (Editor)2 ; SHIGESATO, Yuzo (Editor)3 ; KAMIYA, Toshio (Editor)1
[1] Tokyo Tech, Japan
[2] NREL, United States
[3] Aoyama-Gakuin U., Japan - Source
Thin solid films. 2012, Vol 520, Num 10, pp 3803-3807, 5 p ; ref : 18 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- AZO Haze Magnetron sputtering Solar cell Thin film Thin-film solar cell Transparent electrode ZnO
- Keyword (fr)
- Addition aluminium Cellule solaire Couche mince Dispositif couche mince Dépôt physique phase vapeur Dépôt pulvérisation Figure attaque Gravure Oxyde de zinc Pulvérisation cathodique Pulvérisation haute fréquence Rayonnement IR proche Recuit thermique rapide Spectre visible Texture surface Traitement thermique 8115C 8460J ZnO
- Keyword (en)
- Aluminium additions Solar cells Thin films Thin film devices Physical vapor deposition Sputter deposition Etch pits Etching Zinc oxide Cathode sputtering Radiofrequency sputtering Near infrared radiation Rapid thermal annealing Visible spectra Surface texture Heat treatments
- Keyword (es)
- Zinc óxido Pulverización alta frecuencia
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D06 Energy / 001D06C Natural energy / 001D06C02 Solar energy / 001D06C02D Photovoltaic conversion / 001D06C02D1 Solar cells. Photoelectrochemical cells
- Discipline
- Energy Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 25815711
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2011.10.067 
https://dx.doi.org/10.1016/j.tsf.2011.10.067
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