Cp2TiCH2Si(Me2)NSiMe3 : A single-source precursor to titanium-based ceramic thin films by chemical vapor deposition
- Author
- CHANSOU, B1 ; CHOUKROUN, R1 ; VALADE, L1
[1] Equipe 'Précurseurs Moléculaires et Matériaux', CNRS - Laboratoire de Chimie de Coordination, 205 route de Narbonne, 31077 Toulouse, France - Source
Applied organometallic chemistry. 1997, Vol 11, Num 3, pp 195-203 ; ref : 24 ref
- CODEN
- AOCHEX
- ISSN
- 0268-2605
- Scientific domain
- Organic chemistry
- Publisher
- Wiley, Chichester
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Analyse thermique Couche mince Céramique Diffraction RX Dépôt chimique phase vapeur Microscopie électronique balayage Morphologie Métallocycle Métallocène Précurseur Rayon X Spectrométrie photoélectron Structure surface Synthèse chimique Titane Complexe 1-Aza-2-sila-4-titanacyclobutane(4,4-di-η5-cyclopentadiényl-2,2-diméthyl-1-triméthylsilyl) Métal transition Complexe Titane Composé organique
- Keyword (en)
- Thermal analysis Thin film Ceramic materials X ray diffraction Chemical vapor deposition Scanning electron microscopy Morphology Metallocycle Metallocene Precursor X ray Photoelectron spectrometry Surface structure Chemical synthesis Titanium Complexes Transition metal Complexes Titanium Organic compounds
- Keyword (es)
- Análisis térmico Capa fina Cerámica Difracción RX Depósito químico fase vapor Microscopía electrónica barrido Morfología Metalociclo Metaloceno Precursor Rayos X Espectrometría fotoelectrón Estructura superficie Síntesis química Titanio Complejo Metal transición Complejo Titanio Compuesto orgánico
- Classification
- Pascal
- 001 Exact sciences and technology / 001C Chemistry / 001C03 Organic chemistry / 001C03C Preparations and properties / 001C03C01 Organometalloidal and organometallic compounds / 001C03C01H Transition metals derivatives
- Discipline
- Organic chemistry
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2588097
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1002/(SICI)1099-0739(199703)11:3<195::AID-AOC541>3.0.CO;2-Q 
https://dx.doi.org/10.1002/(SICI)1099-0739(199703)11:3<195::AID-AOC541>3.0.CO;2-Q
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