Multi-asperity nanotribological behavior of single-crystal silicon: Crystallography-induced anisotropy in friction and wear
- Author
- STEMPFLE, Philippe1 ; TAKADOUM, Jamal1
[1] Institut FEMTO-ST (UMR CNRS 6174 - Université de Franche Comté - CNRS - ENSMM - UTBM) ENSMM, 26 Chemin de l'Epitaphe, 25030 Besançon, France - Conference name
- Nordic Symposium on Tribology2010, NORDTRIB (14 ; Storforsen 2010-06)
- Source
Tribology international. 2012, Vol 48, pp 35-43, 9 p ; ref : 49 ref
- CODEN
- TRBIBK
- ISSN
- 0301-679X
- Scientific domain
- Mechanical engineering; Metallurgy, welding
- Publisher
- Elsevier, Kidlington
- Publication country
- United Kingdom
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Carbon nitride coatings MEMS Micro/nanotribology Monocrystalline silicon wafer
- Keyword (fr)
- Anisotropie Basse pression Contrainte contact Cristallographie Céramique Dépendance du temps Echelle nanométrique Frottement Grippage Monocristal Nitrure de carbone Pastille électronique Pression contact Revêtement céramique Rugosité Silicium Surface rugueuse Tribologie Usure adhésive
- Keyword (en)
- Anisotropy Low pressure Contact stress Crystallography Ceramic materials Time dependence Nanometer scale Friction Scuffing Single crystal Carbon nitrides Wafer Contact pressure Ceramic coating Roughness Silicon Rough surface Tribology Adhesive wear
- Keyword (es)
- Anisotropía Baja presión Tensión contacto Cristalografía Cerámica Dependencia del tiempo Frotamiento Agarrotamiento Monocristal Pastilla electrónica Presión contacto Revestimiento cerámico Rugosidad Silicio Superficie rugosa Tribología Desgaste adhesivo
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12D Machine components / 001D12D02 Friction, wear, lubrication
- Discipline
- Mechanical engineering. Mechanical construction. Handling Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 25906218
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.triboint.2011.03.027 
https://dx.doi.org/10.1016/j.triboint.2011.03.027
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