Modelling and characterization of AIN-actuated microcantilevers vibrating in the first in-plane mode
- Author
- RUIZ, V1 ; HERNANDO-GARCIA, J1 ; ABABNEH, A2 ; SEIDEL, H3 ; SCHMID, U4 ; SANCHEZ-ROJAS, J. L1
[1] Departamento de Ingenieria Eléctrica, Electrónica, Automatica y Comunicaciones, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain
[2] Electronic Engineering Department, Hijjawi Faculty for Engineering Technology, Yarmouk University, 21163 Irbid, Jordan
[3] Chair of Micromechanisc, Microuidics/Microactuators, Faculty of Natural Sciences and Technology II, Saarland University, 66123 Saarbrücken, Germany
[4] Department of Microsystems Technology, Institute of Sensor and Actuator Systems, Vienna University of Technology, 1040 Vienna, Austria - Conference title
- Special Issue of the Conference 'Smart Sensors, Actuators and MEMS', within the SPIE Symposium 'MICROTECHNOLOGIES' Prague, Czech Republic, 18-20 April 2011
- Conference name
- SPIE EUROPE Symposium 'MICROTECHNOLOGIES'. Conference 'Smart Sensors, Actuators and MEMS' (Prague 2011-04-18)
- Author (monograph)
- BECKER, Thomas (Editor)1 ; SCHMID, Ulrich (Editor)2
SPIE Europe, Cardiff, United Kingdom (Organiser of meeting)
[1] Department of Sensor, Electronics and Systems Integration, Expert for Autonomous Sensor Systems, EADS Innovation Works, Nesspriel 1ut, 21129 Hamburg, Germany
[2] Department of Sensor and Actuator Systems, Vienna University of Technology, Floragasse 7, 1040 Vienna, Austria - Source
Microsystem technologies. 2012, Vol 18, Num 7-8, pp 997-1001, 5 p ; ref : 1/4 p
- ISSN
- 0946-7076
- Scientific domain
- Electronics; Mechanical engineering; Metrology and instrumentation
- Publisher
- Springer, Heidelberg
- Publication country
- Germany
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Actionneur piézoélectrique Conductivité électrique Dispositif microélectromécanique Dopplérométrie laser Facteur qualité Fréquence résonance Modélisation Nitrure d'aluminium Piézoélectricité Poutre cantilever Semiconducteur piézoélectrique Stroboscopie Vibromètre
- Keyword (en)
- Piezoelectric actuators Electrical conductivity Microelectromechanical device Laser dopplerometry Quality factor Resonance frequency Modelling Aluminium nitride Piezoelectricity Cantilever beam Piezoelectric semiconductors Stroboscopy Vibrometer
- Keyword (es)
- Dispositivo microelectromecánico Dopplerometría laser Frecuencia resonancia Aluminio nitruro Viga cantilever Estroboscopía Vibrómetro
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 26128703
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Access to the document
Install on your browser
DOI
10.1007/s00542-012-1428-x 
https://dx.doi.org/10.1007/s00542-012-1428-x
"O:13:\"PanistOpenUrl\":36:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000idc\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:25:\"10.1007\/s00542-012-1428-x\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:100:\"Modelling and characterization of AIN-actuated microcantilevers vibrating in the first in-plane mode\";s:9:\"\u0000*\u0000jtitle\";s:24:\"Microsystem technologies\";s:9:\"\u0000*\u0000stitle\";s:18:\"Microsyst. technol\";s:7:\"\u0000*\u0000date\";s:4:\"2012\";s:9:\"\u0000*\u0000volume\";s:2:\"18\";s:8:\"\u0000*\u0000issue\";s:3:\"7-8\";s:8:\"\u0000*\u0000spage\";s:3:\"997\";s:8:\"\u0000*\u0000epage\";s:4:\"1001\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0946-7076\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:4:\"RUIZ\";s:10:\"\u0000*\u0000aufirst\";s:1:\"V\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:5:{i:0;s:18:\"HERNANDO-GARCIA, J\";i:1;s:10:\"ABABNEH, A\";i:2;s:9:\"SEIDEL, H\";i:3;s:9:\"SCHMID, U\";i:4;s:19:\"SANCHEZ-ROJAS, J. L\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:155:\"Special Issue of the Conference 'Smart Sensors, Actuators and MEMS', within the SPIE Symposium 'MICROTECHNOLOGIES' Prague, Czech Republic, 18-20 April 2011\";s:8:\"\u0000*\u0000title\";s:100:\"Modelling and characterization of AIN-actuated microcantilevers vibrating in the first in-plane mode\";s:8:\"\u0000*\u0000place\";s:10:\"Heidelberg\";s:6:\"\u0000*\u0000pub\";s:8:\"Springer\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"5\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Panist access
"O:12:\"IstexOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:25:\"10.1007\/s00542-012-1428-x\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:100:\"Modelling and characterization of AIN-actuated microcantilevers vibrating in the first in-plane mode\";s:9:\"\u0000*\u0000jtitle\";s:24:\"Microsystem technologies\";s:9:\"\u0000*\u0000stitle\";s:18:\"Microsyst. technol\";s:7:\"\u0000*\u0000date\";s:4:\"2012\";s:9:\"\u0000*\u0000volume\";s:2:\"18\";s:8:\"\u0000*\u0000issue\";s:3:\"7-8\";s:8:\"\u0000*\u0000spage\";s:3:\"997\";s:8:\"\u0000*\u0000epage\";s:4:\"1001\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0946-7076\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:4:\"RUIZ\";s:10:\"\u0000*\u0000aufirst\";s:1:\"V\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:5:{i:0;s:18:\"HERNANDO-GARCIA, J\";i:1;s:10:\"ABABNEH, A\";i:2;s:9:\"SEIDEL, H\";i:3;s:9:\"SCHMID, U\";i:4;s:19:\"SANCHEZ-ROJAS, J. L\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:155:\"Special Issue of the Conference 'Smart Sensors, Actuators and MEMS', within the SPIE Symposium 'MICROTECHNOLOGIES' Prague, Czech Republic, 18-20 April 2011\";s:8:\"\u0000*\u0000title\";s:100:\"Modelling and characterization of AIN-actuated microcantilevers vibrating in the first in-plane mode\";s:8:\"\u0000*\u0000place\";s:10:\"Heidelberg\";s:6:\"\u0000*\u0000pub\";s:8:\"Springer\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"5\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Istex access
"O:16:\"UnpaywallOpenUrl\":35:{s:8:\"\u0000*\u0000email\";s:27:\"assistance-portail@inist.fr\";s:6:\"\u0000*\u0000fmt\";N;s:6:\"\u0000*\u0000doi\";s:25:\"10.1007\/s00542-012-1428-x\";s:6:\"\u0000*\u0000pii\";N;s:7:\"\u0000*\u0000pmid\";N;s:9:\"\u0000*\u0000atitle\";N;s:9:\"\u0000*\u0000jtitle\";N;s:9:\"\u0000*\u0000stitle\";N;s:7:\"\u0000*\u0000date\";N;s:9:\"\u0000*\u0000volume\";N;s:8:\"\u0000*\u0000issue\";N;s:8:\"\u0000*\u0000spage\";N;s:8:\"\u0000*\u0000epage\";N;s:8:\"\u0000*\u0000pages\";N;s:7:\"\u0000*\u0000issn\";N;s:8:\"\u0000*\u0000eissn\";N;s:9:\"\u0000*\u0000aulast\";N;s:10:\"\u0000*\u0000aufirst\";N;s:9:\"\u0000*\u0000auinit\";N;s:10:\"\u0000*\u0000auinitm\";N;s:5:\"\u0000*\u0000au\";N;s:9:\"\u0000*\u0000aucorp\";N;s:7:\"\u0000*\u0000isbn\";N;s:8:\"\u0000*\u0000coden\";N;s:8:\"\u0000*\u0000genre\";N;s:7:\"\u0000*\u0000part\";N;s:9:\"\u0000*\u0000btitle\";N;s:8:\"\u0000*\u0000title\";N;s:8:\"\u0000*\u0000place\";N;s:6:\"\u0000*\u0000pub\";N;s:10:\"\u0000*\u0000edition\";N;s:9:\"\u0000*\u0000tpages\";N;s:9:\"\u0000*\u0000series\";N;s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";N;}"
Unpaywall access
"O:16:\"EuropePMCOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:25:\"10.1007\/s00542-012-1428-x\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:100:\"Modelling and characterization of AIN-actuated microcantilevers vibrating in the first in-plane mode\";s:9:\"\u0000*\u0000jtitle\";s:24:\"Microsystem technologies\";s:9:\"\u0000*\u0000stitle\";s:18:\"Microsyst. technol\";s:7:\"\u0000*\u0000date\";s:4:\"2012\";s:9:\"\u0000*\u0000volume\";s:2:\"18\";s:8:\"\u0000*\u0000issue\";s:3:\"7-8\";s:8:\"\u0000*\u0000spage\";s:3:\"997\";s:8:\"\u0000*\u0000epage\";s:4:\"1001\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0946-7076\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:4:\"RUIZ\";s:10:\"\u0000*\u0000aufirst\";s:1:\"V\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:5:{i:0;s:18:\"HERNANDO-GARCIA, J\";i:1;s:10:\"ABABNEH, A\";i:2;s:9:\"SEIDEL, H\";i:3;s:9:\"SCHMID, U\";i:4;s:19:\"SANCHEZ-ROJAS, J. L\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:155:\"Special Issue of the Conference 'Smart Sensors, Actuators and MEMS', within the SPIE Symposium 'MICROTECHNOLOGIES' Prague, Czech Republic, 18-20 April 2011\";s:8:\"\u0000*\u0000title\";s:100:\"Modelling and characterization of AIN-actuated microcantilevers vibrating in the first in-plane mode\";s:8:\"\u0000*\u0000place\";s:10:\"Heidelberg\";s:6:\"\u0000*\u0000pub\";s:8:\"Springer\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"5\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Europe PubMed Central access
"O:11:\"BaseOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:25:\"10.1007\/s00542-012-1428-x\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:100:\"Modelling and characterization of AIN-actuated microcantilevers vibrating in the first in-plane mode\";s:9:\"\u0000*\u0000jtitle\";s:24:\"Microsystem technologies\";s:9:\"\u0000*\u0000stitle\";s:18:\"Microsyst. technol\";s:7:\"\u0000*\u0000date\";s:4:\"2012\";s:9:\"\u0000*\u0000volume\";s:2:\"18\";s:8:\"\u0000*\u0000issue\";s:3:\"7-8\";s:8:\"\u0000*\u0000spage\";s:3:\"997\";s:8:\"\u0000*\u0000epage\";s:4:\"1001\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0946-7076\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:4:\"RUIZ\";s:10:\"\u0000*\u0000aufirst\";s:1:\"V\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:5:{i:0;s:18:\"HERNANDO-GARCIA, J\";i:1;s:10:\"ABABNEH, A\";i:2;s:9:\"SEIDEL, H\";i:3;s:9:\"SCHMID, U\";i:4;s:19:\"SANCHEZ-ROJAS, J. L\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:155:\"Special Issue of the Conference 'Smart Sensors, Actuators and MEMS', within the SPIE Symposium 'MICROTECHNOLOGIES' Prague, Czech Republic, 18-20 April 2011\";s:8:\"\u0000*\u0000title\";s:100:\"Modelling and characterization of AIN-actuated microcantilevers vibrating in the first in-plane mode\";s:8:\"\u0000*\u0000place\";s:10:\"Heidelberg\";s:6:\"\u0000*\u0000pub\";s:8:\"Springer\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"5\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Base Search access
"O:12:\"ArXivOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:25:\"10.1007\/s00542-012-1428-x\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:100:\"Modelling and characterization of AIN-actuated microcantilevers vibrating in the first in-plane mode\";s:9:\"\u0000*\u0000jtitle\";s:24:\"Microsystem technologies\";s:9:\"\u0000*\u0000stitle\";s:18:\"Microsyst. technol\";s:7:\"\u0000*\u0000date\";s:4:\"2012\";s:9:\"\u0000*\u0000volume\";s:2:\"18\";s:8:\"\u0000*\u0000issue\";s:3:\"7-8\";s:8:\"\u0000*\u0000spage\";s:3:\"997\";s:8:\"\u0000*\u0000epage\";s:4:\"1001\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0946-7076\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:4:\"RUIZ\";s:10:\"\u0000*\u0000aufirst\";s:1:\"V\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:5:{i:0;s:18:\"HERNANDO-GARCIA, J\";i:1;s:10:\"ABABNEH, A\";i:2;s:9:\"SEIDEL, H\";i:3;s:9:\"SCHMID, U\";i:4;s:19:\"SANCHEZ-ROJAS, J. L\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:0:\"\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:155:\"Special Issue of the Conference 'Smart Sensors, Actuators and MEMS', within the SPIE Symposium 'MICROTECHNOLOGIES' Prague, Czech Republic, 18-20 April 2011\";s:8:\"\u0000*\u0000title\";s:100:\"Modelling and characterization of AIN-actuated microcantilevers vibrating in the first in-plane mode\";s:8:\"\u0000*\u0000place\";s:10:\"Heidelberg\";s:6:\"\u0000*\u0000pub\";s:8:\"Springer\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"5\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
arXiv access
