Molecular layer epitaxy by real-time optical process monitoring
- Author
- BACHMANN, K. J1 ; HÖPFNER, C1 ; BANKS, H. T3 ; ROSSOW, U4 ; SUKIDI, N1 ; MILLER, A. E1 ; HARRIS, C1 ; ASPNES, D. E2 ; DIETZ, N. A2 ; TRAN, H. T3 ; BEELER, S3 ; ITO, K3
[1] Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC 27695-7919, United States
[2] Department of Physics, North Carolina State University, Raleigh, NC 27695-7919, United States
[3] Department of Mathematics, North Carolina State University, Raleigh, NC 27695-7919, United States
[4] Fachbereich Physik, Technische Universität Berlin, Berlin, Germany - Conference title
- Atomic layer epitaxy and related surfaces processes
- Conference name
- ALE-4. International Symposium (4 ; Linz 1996-07-29)
- Author (monograph)
- SITTER, H (Editor)1 ; HEINRICH, H (Editor)1
[1] Johannes Kepler University, Linz, Austria - Source
Applied surface science. 1997, Vol 112, pp 38-47 ; ref : 26 ref
- Publisher
- Elsevier Science, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Condensation faisceau chimique Etude expérimentale Gallium phosphure Matériau semiconducteur Mécanisme croissance Méthode couche atomique Méthode optique Spectre réflexion Ga P GaP Substrat Si Composé minéral
- Keyword (en)
- Chemical beam condensation Experimental study Gallium phosphides Semiconductor materials Growth mechanism Atomic layer method Optical method Reflection spectrum Inorganic compounds
- Keyword (es)
- Condensación haz químico Mecanismo crecimiento Método capa atómica Método óptico Espectro reflexión
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15H Molecular, atomic, ion, and chemical beam epitaxy
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2632501
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0169-4332(96)00975-0 
https://dx.doi.org/10.1016/S0169-4332(96)00975-0
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