Monte Carlo simulation of emission site, angular and energy distributions of secondary electrons in silicon at low beam energies
- Author
- CIAPPA, Mauro1 ; ILGÜNSATIROGLU, Emre1 ; ILLARIONOV, Alexey Yu1
[1] ETH Zurich, Integrated Systems Laboratory, 8092 Zurich, Switzerland - Conference title
- 23rd European Symposium on the Reliability of Electron Devices, Failure Physics and Analysis (ESREF 2012)
- Conference name
- European Symposium on the Reliability of Electron Devices, Failure Physics and Analysis (ESREF 2012) (ESREF 2012) (23 ; Cagliari 2012-10-01)
- Author (monograph)
- MENEGHESSO, G (Editor)1 2 ; CIAPPA, M (Editor)3 ; COVA, P (Editor); IANNUZZO, F (Editor)
[1] Department of Information Engineering, University of Padova, Via Gradenigo 6/b, 35131 Padova, Italy
[2] Italian Universities NanoElectronics Team (IUNET), Via Toffano 2, 40125 Bologna, Italy
[3] ETH Zürich, Switzerland - Source
Microelectronics and reliability. 2012, Vol 52, Num 9-10, pp 2139-2143, 5 p ; ref : 7 ref
- CODEN
- MCRLAS
- ISSN
- 0026-2714
- Scientific domain
- Electronics
- Publisher
- Elsevier, Kidlington
- Publication country
- United Kingdom
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Codage Distribution angulaire Distribution énergie Electron secondaire Electronique faible puissance Energie surface Microscopie électronique balayage Méthode Monte Carlo Silicium Simulation numérique 0779
- Keyword (en)
- Encoding Angular distribution Energy distribution Secondary electron Low-power electronics Surface energy Scanning electron microscopy Monte Carlo methods Silicon Digital simulation
- Keyword (es)
- Distribución energía Electrón secundario
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G79 Scanning probe microscopes, components and techniques
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 26548262
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.microrel.2012.06.091 
https://dx.doi.org/10.1016/j.microrel.2012.06.091
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