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Influence of the plasma oxidation power on the switching properties of Al/CuxO/Cu memristive devices

Author
MCDONALD, N. R1 2 ; BISHOP, S. M2 ; BRIGGS, B. D2 ; VAN NOSTRAND, J. E1 ; CADY, N. C2
[1] Air Force Research Laboratory Rome Research Site, 525 Brooks Road, Rome, NY 13441, United States
[2] University at Albany, SUNY, College of Nanoscale Science and Engineering, 257 Fuller Road, Albany, NY 12203, United States
Conference title
Selected Papers from ISDRS 2011
Conference name
2011 International Semiconductor Device Research Conference (ISDRS 2011) (ISDRS 2011) (6 ; College Park, Maryland 2011-12-07)
Author (monograph)
AKTURK, Akin (Editor)1 ; ILIADIS, Agis A (Editor)1
[1] Electrical and Computer Engineering Department, University of Maryland, College Park, MD, United States
Source

Solid-state electronics. 2012, Vol 78, pp 46-50, 5 p ; ref : 27 ref

ISSN
0038-1101
Scientific domain
Electronics
Publisher
Elsevier, Kidlington
Publication country
United Kingdom
Document type
Conference Paper
Language
English
Author keyword
Complete nonpolar switching CuxO Memristive device Plasma oxidation
Keyword (fr)
Commutation Couche mince Couche oxyde Cuivre Dispositif à mémoire Epaisseur Fabrication microélectronique Gravure ionique réactive Oxydation Oxygène Spectre photoélectron RX Spectrométrie SIMS Memristance
Keyword (en)
Switching Thin film Oxide layer Copper Memory devices Thickness Microelectronic fabrication Reactive ion etching Oxidation Oxygen X-ray photoelectron spectra Secondary ion mass spectrometry Memristor
Keyword (es)
Conmutación Capa fina Capa óxido Cobre Espesor Fabricación microeléctrica Grabado iónico reactivo Oxidación Oxígeno Espectrometría SIMS
Classification
Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03D Electronic equipment and fabrication. Passive components, printed wiring boards, connectics

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)

Pascal
001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03I Storage and reproduction of information / 001D03I02 Magnetic and optical mass memories

Discipline
Electronics
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
26549802

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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