Measurement of the induced plasma current in a planar coil, low-frequency, RF induction plasma source
- Author
- EL-FAYOUMI, M1 ; JONES, I. R1
[1] Department of Physics, Flinders University, GPO Box 2100, Adelaide, 5001, Australia - Conference title
- Europhysics Sectional Conference on Atomic and Molecular Physics of Ionized Gases ESCAMPIG
- Conference name
- Europhysics Sectional Conference on Atomic and Molecular Physics of Ionized Gases ESCAMPIG (13 ; Poprad, High Tatras 1996-08-27)
- Author (monograph)
- LUKAC, Peter (Editor)
European Physical Society, Europe (Funder/Sponsor) - Source
Plasma sources science & technology (Print). 1997, Vol 6, Num 2, pp 201-211 ; ref : 18 ref
- ISSN
- 0963-0252
- Scientific domain
- Plasma physics
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Argon Basse pression Bobine Rogowski Courant électrique Etude expérimentale Plasma couplé inductivement Propriété électrique Source plasma Système RF Vide moyen Vide poussé
- Keyword (en)
- Argon Low pressure Rogowski coil Electric currents Experimental study Inductively coupled plasma Electrical properties Plasma sources RF systems Medium vacuum High vacuum
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B50 Plasma production and heating / 001B50B50D Plasma sources
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B50 Physics of gases, plasmas and electric discharges / 001B50B Physics of plasmas and electric discharges / 001B50B70 Plasma diagnostic techniques and instrumentation / 001B50B70D Electric and magnetic measurements
- Pacs
- 5250D Plasma sources
- Discipline
- Physics of gases, plasmas and electric discharges
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2676763
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0963-0252/6/2/014 
https://dx.doi.org/10.1088/0963-0252/6/2/014
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