The influence of deposition temperature on growth mode, optical and mechanical properties of ZnO films prepared by the ALD method
- Author
- YUAN, N. Y1 2 ; WANG, S. Y1 ; TAN, C. B1 ; WANG, X. Q1 2 ; CHEN, G. G3 ; DING, J. N1 2
[1] Center for Low-Dimensional Materials, Micro-Nano Devices and System, Changzhou University, Changzhou 213164, China
[2] Jiangsu Key Laboratory for Solar Cell Materials and Technology, Changzhou 213164, China
[3] Center for Micro/Nano Science and Technology, Jiangsu University, Zhenjiang 212013, China - Source
Journal of crystal growth. 2013, Vol 366, pp 43-46, 4 p ; ref : 30 ref
- CODEN
- JCRGAE
- ISSN
- 0022-0248
- Scientific domain
- Crystallography; Geology; Metallurgy, welding
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- A1. Growth modes A3. Atomic layer epitaxy B2. Semiconducting II-VI materials
- Keyword (fr)
- Couche mince Croissance cristalline en phase vapeur Croissance film Diffraction RX Dépendance température Effet température Epitaxie Microscopie force atomique Mécanisme croissance Méthode couche atomique Nanocristal Nanoindentation Nanostructure Oxyde de zinc Photoluminescence Propriété mécanique Propriété optique Semiconducteur II-VI Spectre UV visible Taux croissance Température critique 6855A 6860B 7866 8115 Substrat verre ZnO
- Keyword (en)
- Thin films Crystal growth from vapors Film growth XRD Temperature dependence Temperature effects Epitaxy Atomic force microscopy Growth mechanism Atomic layer method Nanocrystal Nanoindentation Nanostructures Zinc oxide Photoluminescence Mechanical properties Optical properties II-VI semiconductors Ultraviolet visible spectrum Growth rate Critical temperature
- Keyword (es)
- Mecanismo crecimiento Método capa atómica Nanocristal Nanoindentacion Zinc óxido Espectro UV visible
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H60 Physical properties of thin films, nonelectronic / 001B60H60B Mechanical and acoustical properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15A Theory and models of film growth
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 26916567
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.jcrysgro.2012.12.024 
https://dx.doi.org/10.1016/j.jcrysgro.2012.12.024
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