The plasma nitriding treatment of TiN/TiCN multilayer films
- Author
- JIANYUN ZHENG1 2 ; JUNYING HAO1 ; XIAOQIANG LIU1 2 ; QIUYU GONG1 2 ; WEIMIN LIU1
[1] State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China
[2] Graduate University of Chinese Academy of Science, Beijing 100049, China - Source
Applied surface science. 2013, Vol 268, pp 195-203, 9 p ; ref : 50 ref
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- Plasma-nitriding treatment Structure and properties The diffusion of the amorphous C Thick TiN/TiCN multilayer films
- Keyword (fr)
- Composé de métal de transition Composé minéral Diffusion(transport) Etat amorphe Multicouche Nitruration Traitement par plasma
- Keyword (en)
- Transition element compounds Inorganic compounds Diffusion Amorphous state Multilayers Nitridation Plasma assisted processing
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology
- Discipline
- Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27129075
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.apsusc.2012.12.058 
https://dx.doi.org/10.1016/j.apsusc.2012.12.058
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