Temperature-dependent yield effects on composite beams used in CMOS MEMS
- Author
- KUO, F. Y1 2 ; CHANG, C. S1 3 ; LIU, Y. S1 2 ; WEN, K. A1 2 ; FAN, L. S1 2 4
[1] Rm. 316, Microelectronics and Information Systems Research Center, No.1001, Daxue Rd., East Dist., Hsinchu City 300, Taiwan, Province of China
[2] Institute of Electronics, National Chiao Tung University, Hsinchu, Taiwan, Province of China
[3] Global Sensing Core, Inc., Hsinchu, Taiwan, Province of China
[4] Institute of Nano Engineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan, Province of China - Source
Journal of micromechanics and microengineering (Print). 2013, Vol 23, Num 3 ; 035023.1-035023.8 ; ref : 19 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Circuit intégré monolithique Contrainte interne Contrainte résiduelle Dispositif microélectromécanique Distribution contrainte Effet température Limite élasticité Méthode analytique Poutre composite Rayon courbure Système sur puce Technologie MOS complémentaire Transducteur capacitif
- Keyword (en)
- Monolithic integrated circuits Internal stresses Residual stresses Microelectromechanical device Stress distribution Temperature effects Yield strength Analytical method Composite girder Radius of curvature System on a chip Complementary MOS technology Capacitive transducer
- Keyword (es)
- Dispositivo microelectromecánico Método analítico Vigna compuesta Radio curvatura Tecnología MOS complementario Transductor capacitivo
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27159147
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/23/3/035023 
https://dx.doi.org/10.1088/0960-1317/23/3/035023
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