The effects of DRIE operational parameters on vertically aligned micropillar arrays
- Author
- MILLER, Kane1 ; MINGXIAO LI1 ; WALSH, Kevin M2 ; FU, Xiao-An1
[1] Department of Chemical Engineering, University of Louisville, Louisville, KY 40208, United States
[2] Department of Electrical and Computer Engineering, University of Louisville, Louisville, KY 40208, United States - Source
Journal of micromechanics and microengineering (Print). 2013, Vol 23, Num 3 ; 035039.1-035039.6 ; ref : 22 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Alignement vertical Formation motif Gravure ionique réactive Lithographie sans masque Microscopie électronique balayage Optimisation Passivation Photolithographie Profil profondeur Réseau(arrangement) Silicium Surface lisse
- Keyword (en)
- Vertical alignment Patterning Reactive ion etching Maskless lithography Scanning electron microscopy Optimization Passivation Photolithography Depth profiles Arrays Silicon Smooth surface
- Keyword (es)
- Alineacíon vertical Grabado iónico reactivo Litografía sin máscara Superficie lisa
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A65 Surface treatments
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27159163
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/23/3/035039 
https://dx.doi.org/10.1088/0960-1317/23/3/035039
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