The influence of target surface morphology on the deposition flux during direct-current magnetron sputtering
- Author
- BOYDENS, F1 ; LEROY, W. P1 ; PERSOONS, R2 ; DEPLA, D1
[1] Research Group DRAFT, Department of Solid State Sciences, Ghent University, Krijgslaan 281 (SI) 9000 Gent, Belgium
[2] VITO, Boeretang 200 2400 Mo, Belgium - Source
Thin solid films. 2013, Vol 531, pp 32-41, 10 p ; ref : 31 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- Angular distribution Magnetron sputtering Powder targets Sputter yield
- Keyword (fr)
- Argent Cuivre Distribution angulaire Dépôt physique phase vapeur Dépôt pulvérisation Morphologie surface Méthode Monte Carlo Pulvérisation cathodique Titane Trajectoire 6855J 8115C
- Keyword (en)
- Silver Copper Angular distribution Physical vapor deposition Sputter deposition Surface morphology Monte Carlo methods Cathode sputtering Titanium Trajectories
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27184655
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2012.11.097 
https://dx.doi.org/10.1016/j.tsf.2012.11.097
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