Characteristics of transparent conductive Al-doped ZnO and Ag―Ti tri-layer thin films prepared by multi-target magnetron sputtering
- Author
- SHIH, W. C1 ; KAO, K. S1 ; CHENG, D. L1 ; CHUNG, C. J2 ; HSIEH, P. T2 ; OU, S. L3
[1] Department of Computer and Communication, SHU-TE University, Kaohsiung, Taiwan, Province of China
[2] Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, Taiwan, Province of China
[3] Department of Materials Science and Engineering, National Chung Hsing University, Taichung, Taiwan, Province of China - Source
Surface & coatings technology. 2013, Vol 219, pp 139-143, 5 p ; ref : 34 ref
- CODEN
- SCTEEJ
- ISSN
- 0257-8972
- Scientific domain
- General chemistry, physical chemistry; Metallurgy, welding
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- AZO Ag-Ti Multilayers Transparent conductive coatings
- Keyword (fr)
- Couche mince Dopage Dépôt physique phase vapeur Magnétron Multicouche Pulvérisation irradiation Revêtement conducteur Traitement surface
- Keyword (en)
- Thin films Doping Physical vapor deposition Magnetrons Multilayers Sputtering Conductive coating Surface treatments
- Keyword (es)
- Doping Revestimiento conductor
- Keyword (de)
- Dopen
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A65 Surface treatments
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy / 001D11C Production techniques / 001D11C06 Surface treatment
- Discipline
- Metals. Metallurgy Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27193756
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.surfcoat.2013.01.017 
https://dx.doi.org/10.1016/j.surfcoat.2013.01.017
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