The Effect of Compositions on the Structure and Properties of As-Prepared and Annealed CdxSnyZn1―x―yO Films
- Author
- YAN WEN ZHOU1 ; PENG FU ZHU1 ; FA YU WU1 ; CHAO KUI ZHANG1
[1] School of Materials and Metallurgy, University of Science and Technology, Liaoning No. 185 Qiansha n Road, Hi-Tech District, Anshan, Liaoning 114051, China - Source
Journal of nanoelectronics and optoelectronics. 2013, Vol 8, Num 2, pp 182-187, 6 p
- ISSN
- 1555-130X
- Scientific domain
- Electronics; Optics
- Publisher
- American Scientific Publishers, Stevenson Ranch, CA
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Annealing Composition Multi-Component TCO Film Powder Targets RF Sputtering
- Keyword (fr)
- Composition chimique Composé quaternaire Conductivité électrique Facteur transmission Granulométrie Grosseur grain Matériau amorphe Matériau revêtu Matériau transparent Nanocristal Nanomatériau Propriété électrique Pulvérisation cathodique Pulvérisation haute fréquence Rayonnement visible Recuit sous vide Structure cristalline 8107B 8115C Substrat verre oxyde de cadmium étain zinc Composé IV-VI
- Keyword (en)
- Chemical composition Quaternary compounds Electrical conductivity Transmittance Grain size analysis Grain size Amorphous material Coated material Transparent material Nanocrystal Nanostructured materials Electrical properties Cathode sputtering Radiofrequency sputtering Visible radiation Vacuum annealing Crystal structure IV-VI compound
- Keyword (es)
- Factor transmisión Granulometría Material amorfo Material revestido Material transparente Nanocristal Pulverización alta frecuencia Recocido en el vacío Compuesto IV-VI
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A07 Nanoscale materials and structures: fabrication and characterization / 001B80A07B Nanocrystalline materials
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27300822
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1166/jno.2013.1451 
https://dx.doi.org/10.1166/jno.2013.1451
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