Surface Dynamics of SiO2-like Films on Polymers Grown by DBD Assisted CVD at Atmospheric Pressure
- Author
- PREMKUMAR, Peter Antony1 2 6 7 ; STAROSTIN, Sergey A1 3 ; DE VRIES, Hindrik3 ; CREATORE, Mariadriana2 ; KOENRAAD, Paul M4 ; MACDONALD, William A5 ; DE SANDEN, Mauritius C. M. Van2
[1] Materials Innovation Institute (M2i) Mekelweg 2, P.O. Box 2008, 2600 GA Delft, Netherlands
[2] Department of Applied Physics, Plasma and Materials Processing Group, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, Netherlands
[3] FUJIFILM Manufacturing Europe B.V, P.O. Box 90156, Tilburg, Netherlands
[4] Department of Applied Physics, Photonics and Semiconductor Nanophysics Group, Eindhoven University ofTechnology, P.O. Box 513, 5600 MB Eindhoven, Netherlands
[5] Dupont Teijin Films, P.O. Box 2002 Wilton, Middlesbrough TS90 8JF, United Kingdom
[6] FOM Institute for Plasma Physics Rijnhuizen, P.O. Box 1207, 3430 BE Nieuwegein, Netherlands
[7] Thin Film Scientific Group, Interuniversity Microelectronics Research Centre (IMEC), Kapeldreef 75, 3001 Leuven, Belgium - Issue title
- Cold Atmospheric Plasmas
- Author (monograph)
- FANELLI, Fiorenza (Editor); BENEDIKT, Jan (Editor)
- Source
Plasma processes and polymers (Print). 2012, Vol 9, Num 11-12, pp 1194-1207, 14 p ; ref : 57 ref
- ISSN
- 1612-8850
- Scientific domain
- Polymers, paint and wood industries; Plasma physics
- Publisher
- Wiley-VCH, Weinheim
- Publication country
- Germany
- Document type
- Article
- Language
- English
- Author keyword
- atmospheric pressure glow discharges (APGD) atomic force microscopy (AFM) dielectric barrier discharges (DBD) films morphology organosilicon precursors roll-to-roll reactors surface roughness
- Keyword (fr)
- Décharge barrière diélectrique Dépôt chimique phase vapeur Effet dimensionnel Etude expérimentale Feuille Matériau revêtu Naphtalate polymère Oxyde de silicium Topographie surface Effet épaisseur Ethylène naphtalate polymère Nanorugosité
- Keyword (en)
- Dielectric barrier discharge Chemical vapor deposition Size effect Experimental study Foil Coated material Naphthalate polymer Silicon oxides Surface topography
- Keyword (es)
- Depósito químico fase vapor Efecto dimensional Estudio experimental Hoja Material revestido Naftalenodicarboxilato polímero
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D10 Polymer industry, paints, wood / 001D10A Technology of polymers / 001D10A06 Forms of application and semi-finished materials / 001D10A06D Sheets and films
- Discipline
- Polymer industry, paints, wood
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27312870
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1002/ppap.201200016 
https://dx.doi.org/10.1002/ppap.201200016
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