Modulated Temperature DSC (MT-DSC) : A new technique for the extensive thermal characterization of complex chemically amplified systems
- Author
- PANIEZ, P. J1 ; BRUN, S1 ; DERROUGH, S2
[1] France Telecom / CNET-Grenoble, BP 98, 38243 Meylan, France
[2] TA Instruments, 18 Rue Jean Bart, 78960 Voisins-le Bretonneux, France - Conference title
- Advances in resist technology and processing XIV (Santa Clara CA, 10-12 March 1997)
- Conference name
- Advances in resist technology and processing. Conference (14 ; Santa Clara CA 1997-03-10)
- Author (monograph)
- Tarascon-Auriol, Régine G (Editor)
- Source
SPIE proceedings series. 1997, pp 168-177 ; ref : 4 ref
- ISBN
- 0-8194-2463-3
- Scientific domain
- Electronics; Optics; Physics; Telecommunications
- Publisher
- SPIE, Bellingham WA
- Publication country
- International
- Document type
- Conference Paper
- Language
- English
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2732074
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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