The application of a plastic diaphragm for a silicon micropump
- Author
- KANG, I.-B1 ; SON, M.-T1 ; HASKARD, M. R1 ; SAMAAN, N1 ; JU, B.-K2
[1] Microelectronics Centre, University of South Australia, The Levels, SA 5095, Australia
[2] Korea Institute of Science and Technology, Seoul, 130-650, Korea, Republic of - Conference title
- Smart electronics and MEMS (San Diego CA, 4-6 March 1997)
- Conference name
- Smart electronics and MEMS. Conference (San Diego CA 1997-03-04)
- Author (monograph)
- Varadan, Vijay K (Editor); McWhorter, Paul J (Editor)
- Source
SPIE proceedings series. 1997, pp 148-155 ; ref : 15 ref
- ISBN
- 0-8194-2459-5
- Scientific domain
- Electronics; Optics; Physics; Telecommunications
- Publisher
- SPIE, Bellingham WA
- Publication country
- International
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Appareillage pneumatique Ethylène polymère Micropompe Microusinage Miniaturisation Mécanique précision Pompe membrane Processus fabrication Silicium
- Keyword (en)
- Pneumatic apparatus Polyethylene Micropump Micromachining Miniaturization Precision engineering Diaphragm pump Production process Silicon
- Keyword (es)
- Equipo neumático Etileno polímero Microbomba Micromaquinado Miniaturización Mecánica precisión Bomba diafragma Proceso fabricación Silicio
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D10 Polymer industry, paints, wood / 001D10A Technology of polymers / 001D10A08 Application fields
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling Polymer industry, paints, wood
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2732673
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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