In-situ ellipsometry solutions using a radial basis function network
- Author
- MARRS, A1
[1] Defence Research Agency, Malvern, Worcs, WR14 3PS, United Kingdom - Conference title
- Artificial neural networks (Cambridge, 7-9 July 1997)
- Conference name
- International conference on artificial neural networks (5 ; Cambridge 1997-07-07)
- Author (monograph)
- Institution of Electrical Engineers, London, United Kingdom (Organiser of meeting)
- Source
IEE conference publication. 1997, pp 173-179 ; ref : 10 ref
- CODEN
- IECPB4
- ISSN
- 0537-9989
- ISBN
- 0-85296-690-3
- Scientific domain
- Electronics; Electrical engineering; Computer science; Telecommunications
- Publisher
- IEE, London
- Publication country
- United Kingdom
- Document type
- Conference Paper
- Language
- English
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2734259
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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