Indium―tin-oxide coatings for applications in photovoltaics and displays deposited using rotary ceramic targets: Recent insights regarding process stability and doping level
- Author
- LIPPENS, Paul1 ; BÜCHEL, Michal1 ; CHIU, David2 ; SZEPESI, Chris3
[1] Umicore Thin Film Products, Alte landstrasse 8, 9496 Balzers, Liechtenstein
[2] Umicore Thin Film Products Taiwan, No. 22, Aly 4, Ln. 711, Bo'ai Street, Zhubei City, Hsinchu County 302, Taiwan, Province of China
[3] Umicore Thin Film Products USA, 50 Sims Avenue, Providence, 02909 RI, United States - Conference title
- Selected Papers from the 9th International Conference on Coatings on Glass and Plastics (ICCG9), Advanced Coating for Large-Area or High-Volume Products, June 24-28, 2012, Breda, Netherlands
- Conference name
- ICCG9 International Conference on Coatings on Glass and Plastics (9 ; Breda 2012-06-24)
- Author (monograph)
- MEINEMA, Harry A (Editor); SPEE, Karel (C.)I.M.A (Editor); PUETZ, Joerg (Editor)
- Source
Thin solid films. 2013, Vol 532, pp 94-97, 4 p ; ref : 6 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Scientific domain
- Crystallography; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Heterojunction crystalline silicon solar cell ITO Rotary magnetron Touch panel
- Keyword (fr)
- Cellule solaire Conductivité électrique Couche mince Densité porteur charge Dispositif photovoltaïque Dopage Dépôt pulvérisation Fluctuation courant Frittage Hétérojonction Nitrure de ruthénium Oxyde d'indium Oxyde d'étain Propriété électrooptique Pulvérisation irradiation Revêtement Silicium Spectre IR proche Spectre IR Vitesse dépôt 7361 8115C 8460J RuN Si SnO2
- Keyword (en)
- Solar cell Electrical conductivity Thin film Charge carrier density Photovoltaic cell Doping Sputter deposition Current fluctuations Sintering Heterojunction Ruthenium nitride Indium oxide Tin oxide Electrooptical properties Sputtering Coatings Silicon Near infrared spectrum Infrared spectrum Deposition rate
- Keyword (es)
- Célula solar Conductividad eléctrica Capa fina Concentración portador carga Dispositivo fotovoltaico Doping Sinterización Heterounión Rutenio nitruro Indio óxido Estaño óxido Propiedad electroóptica Pulverización irradiación Revestimiento Silicio Espectro IR próximo Espectro IR Velocidad deposición
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C61 Electrical properties of specific thin films
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D06 Energy / 001D06C Natural energy / 001D06C02 Solar energy / 001D06C02D Photovoltaic conversion / 001D06C02D1 Solar cells. Photoelectrochemical cells
- Discipline
- Energy Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27398683
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2012.12.116 
https://dx.doi.org/10.1016/j.tsf.2012.12.116
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