Surface characterization
- Author
- MCGUIRE, G. E1 ; WEISS, P. S1 ; KUSHMERICK, J. G1 ; JOHNSON, J. A1 ; SIMKO, S. J1 ; NEMANICH, R. J1 ; PARIKH, N. R1 ; CHOPRA, D. R1
[1] Center for Microelectronics, MCNC, 3021 Cornwallis Road, P.O. Box 12889, Research Triangle Park, North Carolina 27709, United States - Issue title
- 97 Application Reviews
- Source
Analytical chemistry (Washington, DC). 1997, Vol 69, Num 12, pp 231R-250R ; ref : 4 p.1/4
- CODEN
- ANCHAM
- ISSN
- 0003-2700
- Scientific domain
- Analytical chemistry
- Publisher
- American Chemical Society, Washington, DC
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Analyse surface Appareillage Article synthèse Caractérisation Faisceau ionique Microscopie champ proche Microscopie tunnel balayage Microstructure Méthode analyse Progrès technique Revue bibliographique Spectrométrie RX Spectrométrie électron
- Keyword (en)
- Surface analysis Instrumentation Review Characterization Ion beam Scanning probe microscopy Scanning tunneling microscopy Microstructure Analysis method Technical progress Bibliographic review X ray spectrometry Electron spectrometry
- Keyword (es)
- Análisis superficie Instrumentación Artículo síntesis Caracterización Haz iónico Microscopía campo próximo Microscopía túnel barrido Microestructura Método análisis Progreso técnico Revista bibliográfica Espectrometría RX Espectrometría electrón
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A70 Materials testing
- Pascal
- 001 Exact sciences and technology / 001C Chemistry / 001C04 Analytical chemistry / 001C04A General, instrumentation
- Discipline
- Analytical chemistry Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2739974
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1021/a1970009h 
https://dx.doi.org/10.1021/a1970009h
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