A Literature Review on Sampling Techniques in Semiconductor Manufacturing
- Author
- NDUHURA-MUNGA, Justin1 ; RODRIGUEZ-VERJAN, Gloria1 3 ; DAUZERE-PERES, Stéphane1 ; YUGMA, Claude1 ; VIALLETELLE, Philippe2 ; PINATON, Jacques3
[1] Ecole des Mines de Saint-Étienne, Centre Microélectronique de Provence, Gardanne 13541, France
[2] STMicroelectronics Crolles, Crolles 38926, France
[3] STMicroelectronics Rousset, Rousset 13106, France - Source
IEEE transactions on semiconductor manufacturing. 2013, Vol 26, Num 2, pp 188-195, 8 p ; ref : 70 ref
- ISSN
- 0894-6507
- Scientific domain
- Electronics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- Control sampling semiconductor
- Keyword (fr)
- Echantillonnage Etude comparative Fabrication microélectronique Monitorage Méthode adaptative Semiconducteur
- Keyword (en)
- Sampling Comparative study Microelectronic fabrication Monitoring Adaptive method Semiconductor materials
- Keyword (es)
- Muestreo Estudio comparativo Fabricación microeléctrica Monitoreo Método adaptativo Semiconductor(material)
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27400957
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/TSM.2013.2256943 
https://dx.doi.org/10.1109/TSM.2013.2256943
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