Control of metal/oxide electron barriers in CBRAM cells by low work-function liners
- Author
- DE STEFANO, F1 ; AFANAS'EV, V. V1 ; HOUSSA, M1 ; STESMANS, A1 ; OPSOMER, K2 3 ; JURCZAK, M2 ; GOUX, L2
[1] Department of Physics, University of Leuven, Celestijnenlaan 200D, 3001 Leuven, Belgium
[2] IMEC, Kapeldreef 75, 3001 Leuven, Belgium
[3] Department of Solid-State Sciences, University of Gent, Krijgslaan 281, 9000 Gent, Belgium - Issue title
- Insulating Films on Semiconductors 2013
- Author (monograph)
- MAJKUSIAK, Bogdan (Editor)1 ; LUKASIAK, Lidia (Editor)2
[1] Warsaw University of Technology, Poland
[2] National Center for Scientific Research 'Demokritos', Greece - Source
Microelectronic engineering. 2013, Vol 109, pp 156-159, 4 p ; ref : 9 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Scientific domain
- Electronics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- Interface barrier Internal photoemission Work function
- Keyword (fr)
- Alumine Champ électrique Couche mince Couche épaisse Cuivre Dispositif à mémoire Diélectrique Effet champ électrique Interface Isolateur Oxygène Photoémission Spectre photoélectron Structure MIM Transition conductivité électrique Travail sortie 7330 7784 7960J Al2O3 Composé III-VI
- Keyword (en)
- Alumina Electric fields Thin films Thick films Copper Memory devices Dielectric materials Electric field effects Interfaces Insulators Oxygen Photoemission Photoelectron spectra MIM structures Electrical conductivity transitions Work functions III-VI compound
- Keyword (es)
- Dieléctrico Compuesto III-VI
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C30 Surface double layers, schottky barriers, and work functions
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C40 Electronic transport in interface structures / 001B70C40N Metal-nonmetal contacts
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F02 Compound structure devices
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03I Storage and reproduction of information / 001D03I02 Magnetic and optical mass memories
- Discipline
- Electronics Physics of condensed state : electronic structure, electrical, magnetic and optical properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27516677
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.mee.2013.03.088 
https://dx.doi.org/10.1016/j.mee.2013.03.088
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