Glasses for microsystems technology
- Author
- HÜLSENBERG, D1
[1] Technische Universität Ilmenau, Institut für Glas/Keramik-Technik, Postfach 1005 65, 98684 Ilmenau, Germany - Issue title
- LDSD: Micro- and nano-technology
- Author (monograph)
- HENINI, M (Editor)1 ; KARAM, J. M (Editor)2
[1] Department of Physics, University of Nottingham, University Park, Nottingham NG7 2RD, United Kingdom
[2] TIMA/CMP, Microsystems Group, 46 Avenue Felix Viallet, 38031 Grenoble, France - Source
Microelectronics journal. 1997, Vol 28, Num 4, pp 419-432 ; ref : 9 ref
- ISSN
- 0959-8324
- Scientific domain
- Electronics
- Publisher
- Elsevier Science, Oxford
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Capteur mesure Circuit intégré Encapsulation Fabrication microélectronique Isolant Microusinage Verre microsystem
- Keyword (en)
- Measurement sensor Integrated circuit Encapsulation Microelectronic fabrication Insulating material Micromachining Glass
- Keyword (es)
- Captador medida Circuito integrado Encapsulación Fabricación microeléctrica Aislante Micromaquinado Vidrio
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03C Materials
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F17 Microelectronic fabrication (materials and surfaces technology)
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2752611
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/S0026-2692(96)00071-7 
https://dx.doi.org/10.1016/S0026-2692(96)00071-7
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