Integration of NEMS resonators in a 65 nm CMOS technology : Nanofabrication 2012
- Author
- MUÑOZ-GAMARRA, J. L1 ; ALCAINE, P2 ; MARIGÓ, E1 ; GINER, J1 ; URANGA, A1 ; ESTEVE, J2 ; BARNIOL, N1
[1] Electronic Engineering Department, Universitat Autònoma de Barcelona, 08193 Bellaterra, Spain
[2] Instituto de Microelectrónica de Barcelona, IMB-CNM-CSIC, Spain - Conference name
- Micro and Nano Engineering 2012 International Conference (Toulouse 2012-09-16)
- Source
Microelectronic engineering. 2013, Vol 110, pp 246-249, 4 p ; ref : 15 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Scientific domain
- Electronics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- CMOS-NEMS Mass sensor NEMS RF-MEMS Releasing process Resonators
- Keyword (fr)
- Capteur masse Cuivre Dispositif microélectromécanique Dispositif nanoélectromécanique Faisabilité Gravure sèche Microélectronique Miniaturisation Nanofil Polycristal Procédé voie humide Résonateur Silicium polycristallin Technologie MOS complémentaire 8107V 8585
- Keyword (en)
- Mass sensor Copper Microelectromechanical device Nanoelectromechanical device Feasibility Dry etching Microelectronics Miniaturization Nanowires Polycrystal Wet process Resonator Polysilicon Complementary MOS technology
- Keyword (es)
- Sensor masa Cobre Dispositivo microelectromecánico Dispositivo nanoelectromecánico Practicabilidad Grabado seco Microelectrónica Miniaturización Policristal Procedimiento vía húmeda Resonador Silicio policristal Tecnología MOS complementario
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F06 Integrated circuits / 001D03F06A Design. Technologies. Operation analysis. Testing
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F21 Micro- and nanoelectromechanical devices (mems/nems)
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02A Electronic circuits / 001D03G02A1 Oscillators, resonators, synthetizers
- Discipline
- Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27574966
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.mee.2013.01.038 
https://dx.doi.org/10.1016/j.mee.2013.01.038
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