The characteristics of CdxSn1―xO films prepared by RF magnetron sputtering from powder targets
- Author
- ZHOU, Y. W1 ; LIU, X1 ; WU, F. Y1 ; ZHANG, C. K1 ; ZHANG, X. Y1
[1] School of Materials and Metallurgy, University of Science and Technology Liaoning, No.185 Qianshan Rd., Hi-tech District, Anshan, Liaoning 114051, China - Conference title
- Proceedings of the 8th Asian-European International Conference on Plasma Surface Engineering (AEPSE 2011), Dalian, China, September 19-22, 2011
- Conference name
- AEPSE 2011 Asian-European International Conference on Plasma Surface Engineering (8 ; Dalian 2011-09-19)
- Author (monograph)
- CUI, Fu-Zhai (Editor)1 ; LEI, Ming-Kai (Editor)2
Tsinghua University, Beijing, China (Organiser of meeting)
Dalian University of Technology, Dalian, China (Organiser of meeting)
Chinese Mechanical Engineering Society, Haidian District Beijing, China (Organiser of meeting)
European Joint Committee on Plasma and Ion Surface Engineering (EJC/PISE), Braunschweig, Germany (Organiser of meeting)
[1] Tsinghua University, Beijing, China
[2] Dalian University of Technology, Dalian, China - Source
Surface & coatings technology. 2013, Vol 228 ; S150-S154 ; SUP1 ; ref : 40 ref
- CODEN
- SCTEEJ
- ISSN
- 0257-8972
- Scientific domain
- General chemistry, physical chemistry; Metallurgy, welding
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- Closed-field unbalanced magnetron sputtering Multi-component TCO film Powder targets RF sputtering
- Keyword (fr)
- Dépôt physique phase vapeur Magnétron Pulvérisation haute fréquence Pulvérisation irradiation Traitement surface
- Keyword (en)
- Physical vapor deposition Magnetrons Radiofrequency sputtering Sputtering Surface treatments
- Keyword (es)
- Pulverización alta frecuencia
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A65 Surface treatments
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy / 001D11C Production techniques / 001D11C06 Surface treatment
- Discipline
- Metals. Metallurgy Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27696574
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.surfcoat.2012.06.079 
https://dx.doi.org/10.1016/j.surfcoat.2012.06.079
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