Monitoring the microstructure of nanosized palladium layers obtained via thermal and VUV stimulated MOCVD
- Author
- KUCHUMOV, B. M1 ; KORETSKAYA, T. P1 ; IGUMENOV, I. K1 ; MAKSIMOVSKII, E. A1 ; VORONOV, Yu. P2
[1] Institute of Inorganic Chemistry, SB RAS, Lavrentiev Ave. 3, 630090 Novosibirsk, Russian Federation
[2] Korpus LTD, Kotovskii Str. 17-63, 630108 Novosibirsk, Russian Federation - Conference title
- 19th European Conference on Chemical Vapor Deposition (EuroCVD19), Varna, Bulgaria, 1st-6th September 2013
- Conference name
- EuroCVD19 European Conference on Chemical Vapor Deposition (19 ; Varna 2013-09-01)
- Author (monograph)
- MAURY, Francis (Editor); GESHEVA, Kostadinka (Editor); HOFFMANN, Patrick (Editor)1 ; MALANDRINO, Graziella (Editor)2
[1] Empa, Switzerland
[2] Univ. Catania, Italy - Source
Surface & coatings technology. 2013, Vol 230, pp 266-272, 7 p ; ref : 23 ref
- CODEN
- SCTEEJ
- ISSN
- 0257-8972
- Scientific domain
- General chemistry, physical chemistry; Metallurgy, welding
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- Russian
- Author keyword
- MOCVD Nanolayer growth stages Pd Voronoi―Delaunay method
- Keyword (fr)
- Dépôt chimique phase vapeur Microstructure Palladium Traitement surface
- Keyword (en)
- CVD Microstructure Palladium Surface treatments
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A65 Surface treatments
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27720093
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.surfcoat.2013.06.049 
https://dx.doi.org/10.1016/j.surfcoat.2013.06.049
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