Testing of a single-polarity piezoresistive three-dimensional stress-sensing chip
- Author
- GHARIB, H. H1 ; MOUSSA, W. A1
[1] Department of Mechanical Engineering, University of Alberta, Alberta, Canada - Source
Journal of micromechanics and microengineering (Print). 2013, Vol 23, Num 9 ; 095036.1-095036.13 ; ref : 31 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Capteur déformation Champ déformation Charge appliquée Contrainte compression Dispositif piézorésistif Distribution contrainte Essai flexion Microusinage Méthode numérique Méthode élément fini Système sur puce Tenseur contrainte
- Keyword (en)
- Strain sensors Strain distribution Applied load Compressive stress Piezoresistive devices Stress distribution Bending test Micromachining Numerical method Finite element method System on a chip Stress tensor
- Keyword (es)
- Campo deformación Carga aplicada Tensión compresión Ensayo flexion Método numérico Tensor tensión
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07D Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B40 Fundamental areas of phenomenology (including applications) / 001B40F Solid mechanics / 001B40F30 Structural and continuum mechanics / 001B40F30R Measurement and testing methods
- Discipline
- Metrology Physics : solid mechanics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27749809
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/23/9/095036 
https://dx.doi.org/10.1088/0960-1317/23/9/095036
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