Temperature-Compensated CMOS-MEMS Oxide Resonators
- Author
- LIU, Yu-Chia1 ; TSAI, Ming-Han1 2 ; CHEN, Wen-Chien3 ; LI, Ming-Huang1 ; LI, Sheng-Shian1 3 ; WEILEUN FANG1 3
[1] Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu 30013, Taiwan, Province of China
[2] PixArt Imaging Inc., Hsinchu 30013, Taiwan, Province of China
[3] Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan, Province of China - Source
Journal of microelectromechanical systems. 2013, Vol 22, Num 5, pp 1054-1065, 12 p ; ref : 36 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- CMOS-MEMS integration feedthrough cancellation high Q large stopband rejection micromechanical resonator passive temperature compensation
- Keyword (fr)
- Attaque chimique Compensation thermique Dispositif microélectromécanique Filtre coupe bande Large bande Oxyde de silicium Sélectivité Technologie MOS complémentaire Transducteur capacitif Résonateur micromécanique
- Keyword (en)
- Chemical etching Thermal compensation Microelectromechanical device Band-stop filters Wide band Silicon oxides Selectivity Complementary MOS technology Capacitive transducer Micromechanical resonators
- Keyword (es)
- Ataque químico Compensación térmica Dispositivo microelectromecánico Banda ancha Selectividad Tecnología MOS complementario Transductor capacitivo Resonador micromecánico
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D02 Computer science; control theory; systems / 001D02B Software / 001D02B04 Computer systems and distributed systems. User interface
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03G Electric, optical and optoelectronic circuits / 001D03G02 Circuit properties / 001D03G02B Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits
- Discipline
- Computer science : theoretical automation and systems Electronics Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 27816033
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/JMEMS.2013.2263091 
https://dx.doi.org/10.1109/JMEMS.2013.2263091
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