Laser probing determination of the thermal conductivity of integrated circuit dielectric layers
- Author
- PHAN, T1 ; DILHAIRE, S1 ; BATSALE, J.-C2 ; QUINTARD, V1 ; CLAEYS, W1
[1] Laboratoire de Caractérisation Optique, Centre de Physique Moléculaire Optique et Hertzienne (CPMOH), Université Bordeaux I, 351 cours de la Libération, 33405 Talence, France
[2] Laboratoire Energétique et Phénomènes de Transfert (LEPT), Ecole Nationale Supérieure des Arts et Métiers (ENSAM), Esplanade des Arts et Métiers, 33405 Talence, France - Conference title
- Thermophysical properties
- Conference name
- ECTP: European Conference on Thermophysical Properties (14 ; Lyon-Villeurbanne 1996-09-16)
- Author (monograph)
- SACADURA, Jean-François (Author of introductory parts)1
[1] INSA de Lyon, CETHIL/LMFT, Villeurbanne, France - Source
High Temperatures. High Pressures (Print). 1997, Vol 29, Num 1, pp 81-88 ; ref : 12 ref
- CODEN
- HTHPAK
- ISSN
- 0018-1544
- Scientific domain
- Crystallography; Metallurgy, welding; Condensed state physics
- Publisher
- Pion, London
- Publication country
- United Kingdom
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Circuit intégré Diélectrique Etude théorique Fiabilité Interconnexion Irradiation laser Mesure température Méthode essai Résultat expérimental Transfert chaleur
- Keyword (en)
- Integrated circuit Dielectric materials Theoretical study Reliability Interconnection Laser irradiation Temperature measurement Test method Experimental result Heat transfer
- Keyword (es)
- Circuito integrado Dieléctrico Estudio teórico Fiabilidad Interconexión Irradiación láser Medida temperatura Método ensayo Resultado experimental Transferencia térmica
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03B Testing, measurement, noise and reliability
- Discipline
- Electronics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2786222
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1068/htec367 
https://dx.doi.org/10.1068/htec367
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