A new investigation of oxygen flow influence on ITO thin films by magnetron sputtering
- Author
- AQING CHEN1 2 ; KAIGUI ZHU1 ; HUICAI ZHONG3 ; QINGYI SHAO4 ; GUANGLU GE5
[1] Department of Physics, Beihang University, Beijing 100191, China
[2] School of New Energy Engineering, Leshan Vocational and Technical College, Leshan 614000, China
[3] Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
[4] Laboratory of Quantum Information Technology, School of Physics and Telecommunication Engineering, South China Normal University, Guangzhou 510006, China
[5] Laboratory of Nanostanderization, National Center for Nanoscience and Technology, Beijing 100190, China - Source
Solar energy materials and solar cells. 2014, Vol 120, pp 157-162, 6 p ; a ; ref : 36 ref
- ISSN
- 0927-0248
- Scientific domain
- General chemistry, physical chemistry; Energy
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- Blue shifts Density functional theory ITO thin films Magnetron sputtering Oxygen vacancy
- Keyword (fr)
- Absorption optique Addition étain Couche ITO Lacune Limite absorption Méthode fonctionnelle densité Niveau Fermi Oxyde d'indium Oxygène Pulvérisation cathodique Simulation mathématique Spectre photoélectron RX Spectrométrie photoélectron Structure bande Verre ITO
- Keyword (en)
- Optical absorption Tin addition ITO layers Vacancy Absorption edge Density functional method Fermi level Indium oxide Oxygen Cathodic sputtering Mathematical simulation X-ray photoelectron spectra Photoelectron spectrometry Band structure Glass
- Keyword (es)
- Absorción óptica Adición estaño Cavidad Límite absorción Nivel Fermi Indio óxido Oxígeno Pulverización catódica Simulación matemática Espectrometría fotoelectrón Estructura banda Vidrio
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D06 Energy / 001D06C Natural energy
- Discipline
- Energy
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 28045352
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.solmat.2013.08.036 
https://dx.doi.org/10.1016/j.solmat.2013.08.036
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