A nondestructive calibration method for maximizing the range and accuracy of AFM force measurement
- Author
- HUI XIE1 ; WEIBIN RONG1 ; AIWEN WU1 ; LINING SUN1
[1] The State Key Laboratory of Robotics and Systems, Harbin Institute of Technology, C1-507, 2 Yikuang Street, 150080 Harbin, China - Source
Journal of micromechanics and microengineering (Print). 2014, Vol 24, Num 2 ; 025005.1-025005.12 ; ref : 23 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Déflexion Etalonnage Mesure force Microscopie force atomique Mécanisme articulé Méthode non destructive Photodiode Système 2 degrés liberté
- Keyword (en)
- Deflection Calibration Force measurement Atomic force microscopy Linkage mechanism Non destructive method Photodiodes System with two degrees of freedom
- Keyword (es)
- Mecanismo articulado Método no destructivo Sistema 2 grados libertad
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G79 Scanning probe microscopes, components and techniques / 001B00G79L Atomic force microscopes
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 28149506
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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