Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition
- Autor
- HIRVIKORPI, Terhi1 ; LAINE, Risto1 ; HARLIN, Ali2 ; KOSTAMO, Juhana1 ; VÄHÄ-NISSI, Mika2 ; KILPI, Väinö1 ; SALO, Erkki2 ; LI, Wei-Min1 ; LINDFORS, Sven1 ; VARTIAINEN, Jari2 ; KENTTÄ, Eija2 ; NIKKOLA, Juha3
[1] Picosun Oy, Tietotie 3, 02150 Espoo, Finland
[2] VTT Technical Research Centre of Finland, Biologinkuja 7, Espoo, P.O. Box 1000, 02044 VTT, Finland
[3] VTT Technical Research Centre of Finland, P.O. Box 1300, 33101 Tampere, Finland - Fuente
Thin solid films. 2014, Vol 550, pp 164-169, 6 p ; ref : 31 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Campo Científico
- Crystallography; Metallurgy, welding; Condensed state physics
- Editor
- Elsevier, Amsterdam
- País de la publicación
- Netherlands
- Tipo de documento
- Article
- Idioma
- English
- Palabra clave de autor
- Aluminum oxide Atomic layer deposition Barrier Flexible material Polymer Roll-to-roll
- Palabra clave (fr)
- Capteur Couche mince Croissance cristalline en phase vapeur Densité élevée Densité énergie Diode électroluminescente organique Diode électroluminescente Dispositif couche mince Dispositif photovoltaïque Haute énergie Méthode couche atomique Polymère Propriété plastique Revêtement Synthèse nanomatériau 8115K 8116 8560D 8560J Al2O3
- Palabra clave (in)
- Sensors Thin films Crystal growth from vapors High density Energy density Organic light emitting diodes Light emitting diodes Thin film devices Photovoltaic cell High energy Atomic layer method Polymers Plastic properties Coatings Nanomaterial synthesis
- Palabra clave (es)
- Densidad elevada Dispositivo fotovoltaico Alta energía Método capa atómica Propiedad plástica Síntesis nanomaterial
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15K Vapor phase epitaxy; growth from vapor phase
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A16 Methods of nanofabrication
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03F Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices / 001D03F15 Optoelectronic devices
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D06 Energy / 001D06C Natural energy / 001D06C02 Solar energy / 001D06C02D Photovoltaic conversion / 001D06C02D1 Solar cells. Photoelectrochemical cells
- Disciplina
- Electronics Energy Physics and materials science
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 28251205
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2013.10.148 
https://dx.doi.org/10.1016/j.tsf.2013.10.148
"O:13:\"PanistOpenUrl\":36:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000idc\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:25:\"10.1016\/j.tsf.2013.10.148\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:102:\"Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition\";s:9:\"\u0000*\u0000jtitle\";s:16:\"Thin solid films\";s:9:\"\u0000*\u0000stitle\";s:16:\"Thin solid films\";s:7:\"\u0000*\u0000date\";s:4:\"2014\";s:9:\"\u0000*\u0000volume\";s:3:\"550\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"164\";s:8:\"\u0000*\u0000epage\";s:3:\"169\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0040-6090\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:10:\"HIRVIKORPI\";s:10:\"\u0000*\u0000aufirst\";s:5:\"Terhi\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:11:{i:0;s:12:\"LAINE, Risto\";i:1;s:11:\"HARLIN, Ali\";i:2;s:15:\"KOSTAMO, Juhana\";i:3;s:18:\"V\u00c4H\u00c4-NISSI, Mika\";i:4;s:14:\"KILPI, V\u00e4in\u00f6\";i:5;s:11:\"SALO, Erkki\";i:6;s:11:\"LI, Wei-Min\";i:7;s:14:\"LINDFORS, Sven\";i:8;s:16:\"VARTIAINEN, Jari\";i:9;s:13:\"KENTT\u00c4, Eija\";i:10;s:13:\"NIKKOLA, Juha\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"THSFAP\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:102:\"Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition\";s:8:\"\u0000*\u0000place\";s:9:\"Amsterdam\";s:6:\"\u0000*\u0000pub\";s:8:\"Elsevier\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Acceso mediante Panist
"O:12:\"IstexOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:25:\"10.1016\/j.tsf.2013.10.148\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:102:\"Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition\";s:9:\"\u0000*\u0000jtitle\";s:16:\"Thin solid films\";s:9:\"\u0000*\u0000stitle\";s:16:\"Thin solid films\";s:7:\"\u0000*\u0000date\";s:4:\"2014\";s:9:\"\u0000*\u0000volume\";s:3:\"550\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"164\";s:8:\"\u0000*\u0000epage\";s:3:\"169\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0040-6090\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:10:\"HIRVIKORPI\";s:10:\"\u0000*\u0000aufirst\";s:5:\"Terhi\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:11:{i:0;s:12:\"LAINE, Risto\";i:1;s:11:\"HARLIN, Ali\";i:2;s:15:\"KOSTAMO, Juhana\";i:3;s:18:\"V\u00c4H\u00c4-NISSI, Mika\";i:4;s:14:\"KILPI, V\u00e4in\u00f6\";i:5;s:11:\"SALO, Erkki\";i:6;s:11:\"LI, Wei-Min\";i:7;s:14:\"LINDFORS, Sven\";i:8;s:16:\"VARTIAINEN, Jari\";i:9;s:13:\"KENTT\u00c4, Eija\";i:10;s:13:\"NIKKOLA, Juha\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"THSFAP\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:102:\"Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition\";s:8:\"\u0000*\u0000place\";s:9:\"Amsterdam\";s:6:\"\u0000*\u0000pub\";s:8:\"Elsevier\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Acceso mediante Istex
"O:16:\"UnpaywallOpenUrl\":35:{s:8:\"\u0000*\u0000email\";s:27:\"assistance-portail@inist.fr\";s:6:\"\u0000*\u0000fmt\";N;s:6:\"\u0000*\u0000doi\";s:25:\"10.1016\/j.tsf.2013.10.148\";s:6:\"\u0000*\u0000pii\";N;s:7:\"\u0000*\u0000pmid\";N;s:9:\"\u0000*\u0000atitle\";N;s:9:\"\u0000*\u0000jtitle\";N;s:9:\"\u0000*\u0000stitle\";N;s:7:\"\u0000*\u0000date\";N;s:9:\"\u0000*\u0000volume\";N;s:8:\"\u0000*\u0000issue\";N;s:8:\"\u0000*\u0000spage\";N;s:8:\"\u0000*\u0000epage\";N;s:8:\"\u0000*\u0000pages\";N;s:7:\"\u0000*\u0000issn\";N;s:8:\"\u0000*\u0000eissn\";N;s:9:\"\u0000*\u0000aulast\";N;s:10:\"\u0000*\u0000aufirst\";N;s:9:\"\u0000*\u0000auinit\";N;s:10:\"\u0000*\u0000auinitm\";N;s:5:\"\u0000*\u0000au\";N;s:9:\"\u0000*\u0000aucorp\";N;s:7:\"\u0000*\u0000isbn\";N;s:8:\"\u0000*\u0000coden\";N;s:8:\"\u0000*\u0000genre\";N;s:7:\"\u0000*\u0000part\";N;s:9:\"\u0000*\u0000btitle\";N;s:8:\"\u0000*\u0000title\";N;s:8:\"\u0000*\u0000place\";N;s:6:\"\u0000*\u0000pub\";N;s:10:\"\u0000*\u0000edition\";N;s:9:\"\u0000*\u0000tpages\";N;s:9:\"\u0000*\u0000series\";N;s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";N;}"
Acceso mediante Unpaywall
"O:16:\"EuropePMCOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:25:\"10.1016\/j.tsf.2013.10.148\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:102:\"Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition\";s:9:\"\u0000*\u0000jtitle\";s:16:\"Thin solid films\";s:9:\"\u0000*\u0000stitle\";s:16:\"Thin solid films\";s:7:\"\u0000*\u0000date\";s:4:\"2014\";s:9:\"\u0000*\u0000volume\";s:3:\"550\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"164\";s:8:\"\u0000*\u0000epage\";s:3:\"169\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0040-6090\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:10:\"HIRVIKORPI\";s:10:\"\u0000*\u0000aufirst\";s:5:\"Terhi\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:11:{i:0;s:12:\"LAINE, Risto\";i:1;s:11:\"HARLIN, Ali\";i:2;s:15:\"KOSTAMO, Juhana\";i:3;s:18:\"V\u00c4H\u00c4-NISSI, Mika\";i:4;s:14:\"KILPI, V\u00e4in\u00f6\";i:5;s:11:\"SALO, Erkki\";i:6;s:11:\"LI, Wei-Min\";i:7;s:14:\"LINDFORS, Sven\";i:8;s:16:\"VARTIAINEN, Jari\";i:9;s:13:\"KENTT\u00c4, Eija\";i:10;s:13:\"NIKKOLA, Juha\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"THSFAP\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:102:\"Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition\";s:8:\"\u0000*\u0000place\";s:9:\"Amsterdam\";s:6:\"\u0000*\u0000pub\";s:8:\"Elsevier\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Acceso mediante Europe PubMed Central
"O:11:\"BaseOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:25:\"10.1016\/j.tsf.2013.10.148\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:102:\"Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition\";s:9:\"\u0000*\u0000jtitle\";s:16:\"Thin solid films\";s:9:\"\u0000*\u0000stitle\";s:16:\"Thin solid films\";s:7:\"\u0000*\u0000date\";s:4:\"2014\";s:9:\"\u0000*\u0000volume\";s:3:\"550\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"164\";s:8:\"\u0000*\u0000epage\";s:3:\"169\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0040-6090\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:10:\"HIRVIKORPI\";s:10:\"\u0000*\u0000aufirst\";s:5:\"Terhi\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:11:{i:0;s:12:\"LAINE, Risto\";i:1;s:11:\"HARLIN, Ali\";i:2;s:15:\"KOSTAMO, Juhana\";i:3;s:18:\"V\u00c4H\u00c4-NISSI, Mika\";i:4;s:14:\"KILPI, V\u00e4in\u00f6\";i:5;s:11:\"SALO, Erkki\";i:6;s:11:\"LI, Wei-Min\";i:7;s:14:\"LINDFORS, Sven\";i:8;s:16:\"VARTIAINEN, Jari\";i:9;s:13:\"KENTT\u00c4, Eija\";i:10;s:13:\"NIKKOLA, Juha\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"THSFAP\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:102:\"Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition\";s:8:\"\u0000*\u0000place\";s:9:\"Amsterdam\";s:6:\"\u0000*\u0000pub\";s:8:\"Elsevier\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Acceso mediante Base Search
"O:12:\"ArXivOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:7:\"journal\";s:6:\"\u0000*\u0000doi\";s:25:\"10.1016\/j.tsf.2013.10.148\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:102:\"Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition\";s:9:\"\u0000*\u0000jtitle\";s:16:\"Thin solid films\";s:9:\"\u0000*\u0000stitle\";s:16:\"Thin solid films\";s:7:\"\u0000*\u0000date\";s:4:\"2014\";s:9:\"\u0000*\u0000volume\";s:3:\"550\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"164\";s:8:\"\u0000*\u0000epage\";s:3:\"169\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0040-6090\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:10:\"HIRVIKORPI\";s:10:\"\u0000*\u0000aufirst\";s:5:\"Terhi\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:11:{i:0;s:12:\"LAINE, Risto\";i:1;s:11:\"HARLIN, Ali\";i:2;s:15:\"KOSTAMO, Juhana\";i:3;s:18:\"V\u00c4H\u00c4-NISSI, Mika\";i:4;s:14:\"KILPI, V\u00e4in\u00f6\";i:5;s:11:\"SALO, Erkki\";i:6;s:11:\"LI, Wei-Min\";i:7;s:14:\"LINDFORS, Sven\";i:8;s:16:\"VARTIAINEN, Jari\";i:9;s:13:\"KENTT\u00c4, Eija\";i:10;s:13:\"NIKKOLA, Juha\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"THSFAP\";s:8:\"\u0000*\u0000genre\";s:7:\"article\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:0:\"\";s:8:\"\u0000*\u0000title\";s:102:\"Barrier properties of plastic films coated with an Al2O3 layer by roll-to-toll atomic layer deposition\";s:8:\"\u0000*\u0000place\";s:9:\"Amsterdam\";s:6:\"\u0000*\u0000pub\";s:8:\"Elsevier\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Acceso mediante arXiv
