Real-time curvature and optical spectroscopy monitoring of magnetron-sputtered WTi alloy thin films
- Author
- LE PRIOL, A1 2 ; SIMONOT, L1 ; ABADIAS, G1 ; GUERIN, P1 ; RENAULT, P.-O1 ; LE BOURHIS, E1
[1] Institut P', CNRS-University of Poitiers, SP2MI, Bd Marie et Pierre Curie, BP30179, 86962 Futuroscope-Chasseneuil, France
[2] Sagem Defense Sécurité, 72-74 rue de la Tour Billy, BP72, 95101 Argenteuil, France - Conference title
- Proceedings of the 40th International Conference on Metallurgical Coatings and Thin Films, ICMCTF 2013, San Diego, California, April 29 - May 3, 2013
- Conference name
- ICMCTF 2013 International Conference on Metallurgical Coatings and Thin Films (40 ; San Diego, California 2013-04-29)
- Author (monograph)
- AOUADI, Samir (Editor)1 ; BROITMAN, Esteban (Editor)2 ; KODAMBAKA, Suneel (Editor)3 ; STÜBER, Michael (Editor)4 ; VEPREK, Stan (Editor)5
American Vacuum Society (AVS), Advanced Surface Engineering Division (ASED), New York, NY, United States (Organiser of meeting)
[1] University of North Texas, Dept. of Materials Science and Engineering, 1155 Union Circle #305310, Denton, TX 76203-5017, United States
[2] Linköping University, Dept. of Physics, Chemistry and Biology IFM, 581 83 Linköping, Sweden
[3] University of California Los Angeles, Dept. of Materials Science, E-V 3121J, 410 Westwood Plaza, Los Angeles, CA 90095, United States
[4] Karlsruhe Institute of Technology (KIT), Inst. for Applied Materials (IAM-AWP), Department of Composites and Thin Films, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
[5] Technical University Munich, Department of Chemistry, Lichtenbergstrasse 4, 85747 Garching, Germany - Source
Surface & coatings technology. 2013, Vol 237, pp 112-117, 6 p ; ref : 29 ref
- CODEN
- SCTEEJ
- ISSN
- 0257-8972
- Scientific domain
- General chemistry, physical chemistry; Metallurgy, welding
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Conference Paper
- Language
- English
- Author keyword
- In situ optical spectroscopy In situ wafer curvature Magnetron sputtering Thin film growth WTi alloy
- Keyword (fr)
- Couche mince Dépôt physique phase vapeur In situ Magnétron Pulvérisation irradiation Traitement surface
- Keyword (en)
- Thin films Physical vapor deposition In situ Magnetrons Sputtering Surface treatments
- Keyword (es)
- In situ
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A65 Surface treatments
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D11 Metals. Metallurgy / 001D11C Production techniques / 001D11C06 Surface treatment
- Discipline
- Metals. Metallurgy Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 28263225
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.surfcoat.2013.08.065 
https://dx.doi.org/10.1016/j.surfcoat.2013.08.065
"O:13:\"PanistOpenUrl\":36:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000idc\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:30:\"10.1016\/j.surfcoat.2013.08.065\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:99:\"Real-time curvature and optical spectroscopy monitoring of magnetron-sputtered WTi alloy thin films\";s:9:\"\u0000*\u0000jtitle\";s:29:\"Surface & coatings technology\";s:9:\"\u0000*\u0000stitle\";s:19:\"Surf. coat. technol\";s:7:\"\u0000*\u0000date\";s:4:\"2013\";s:9:\"\u0000*\u0000volume\";s:3:\"237\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"112\";s:8:\"\u0000*\u0000epage\";s:3:\"117\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0257-8972\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:8:\"LE PRIOL\";s:10:\"\u0000*\u0000aufirst\";s:1:\"A\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:5:{i:0;s:10:\"SIMONOT, L\";i:1;s:10:\"ABADIAS, G\";i:2;s:9:\"GUERIN, P\";i:3;s:13:\"RENAULT, P.-O\";i:4;s:13:\"LE BOURHIS, E\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"SCTEEJ\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:149:\"Proceedings of the 40th International Conference on Metallurgical Coatings and Thin Films, ICMCTF 2013, San Diego, California, April 29 - May 3, 2013\";s:8:\"\u0000*\u0000title\";s:99:\"Real-time curvature and optical spectroscopy monitoring of magnetron-sputtered WTi alloy thin films\";s:8:\"\u0000*\u0000place\";s:9:\"Amsterdam\";s:6:\"\u0000*\u0000pub\";s:8:\"Elsevier\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Panist access
"O:12:\"IstexOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:30:\"10.1016\/j.surfcoat.2013.08.065\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:99:\"Real-time curvature and optical spectroscopy monitoring of magnetron-sputtered WTi alloy thin films\";s:9:\"\u0000*\u0000jtitle\";s:29:\"Surface & coatings technology\";s:9:\"\u0000*\u0000stitle\";s:19:\"Surf. coat. technol\";s:7:\"\u0000*\u0000date\";s:4:\"2013\";s:9:\"\u0000*\u0000volume\";s:3:\"237\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"112\";s:8:\"\u0000*\u0000epage\";s:3:\"117\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0257-8972\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:8:\"LE PRIOL\";s:10:\"\u0000*\u0000aufirst\";s:1:\"A\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:5:{i:0;s:10:\"SIMONOT, L\";i:1;s:10:\"ABADIAS, G\";i:2;s:9:\"GUERIN, P\";i:3;s:13:\"RENAULT, P.-O\";i:4;s:13:\"LE BOURHIS, E\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"SCTEEJ\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:149:\"Proceedings of the 40th International Conference on Metallurgical Coatings and Thin Films, ICMCTF 2013, San Diego, California, April 29 - May 3, 2013\";s:8:\"\u0000*\u0000title\";s:99:\"Real-time curvature and optical spectroscopy monitoring of magnetron-sputtered WTi alloy thin films\";s:8:\"\u0000*\u0000place\";s:9:\"Amsterdam\";s:6:\"\u0000*\u0000pub\";s:8:\"Elsevier\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Istex access
"O:16:\"UnpaywallOpenUrl\":35:{s:8:\"\u0000*\u0000email\";s:27:\"assistance-portail@inist.fr\";s:6:\"\u0000*\u0000fmt\";N;s:6:\"\u0000*\u0000doi\";s:30:\"10.1016\/j.surfcoat.2013.08.065\";s:6:\"\u0000*\u0000pii\";N;s:7:\"\u0000*\u0000pmid\";N;s:9:\"\u0000*\u0000atitle\";N;s:9:\"\u0000*\u0000jtitle\";N;s:9:\"\u0000*\u0000stitle\";N;s:7:\"\u0000*\u0000date\";N;s:9:\"\u0000*\u0000volume\";N;s:8:\"\u0000*\u0000issue\";N;s:8:\"\u0000*\u0000spage\";N;s:8:\"\u0000*\u0000epage\";N;s:8:\"\u0000*\u0000pages\";N;s:7:\"\u0000*\u0000issn\";N;s:8:\"\u0000*\u0000eissn\";N;s:9:\"\u0000*\u0000aulast\";N;s:10:\"\u0000*\u0000aufirst\";N;s:9:\"\u0000*\u0000auinit\";N;s:10:\"\u0000*\u0000auinitm\";N;s:5:\"\u0000*\u0000au\";N;s:9:\"\u0000*\u0000aucorp\";N;s:7:\"\u0000*\u0000isbn\";N;s:8:\"\u0000*\u0000coden\";N;s:8:\"\u0000*\u0000genre\";N;s:7:\"\u0000*\u0000part\";N;s:9:\"\u0000*\u0000btitle\";N;s:8:\"\u0000*\u0000title\";N;s:8:\"\u0000*\u0000place\";N;s:6:\"\u0000*\u0000pub\";N;s:10:\"\u0000*\u0000edition\";N;s:9:\"\u0000*\u0000tpages\";N;s:9:\"\u0000*\u0000series\";N;s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";N;}"
Unpaywall access
"O:16:\"EuropePMCOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:30:\"10.1016\/j.surfcoat.2013.08.065\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:99:\"Real-time curvature and optical spectroscopy monitoring of magnetron-sputtered WTi alloy thin films\";s:9:\"\u0000*\u0000jtitle\";s:29:\"Surface & coatings technology\";s:9:\"\u0000*\u0000stitle\";s:19:\"Surf. coat. technol\";s:7:\"\u0000*\u0000date\";s:4:\"2013\";s:9:\"\u0000*\u0000volume\";s:3:\"237\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"112\";s:8:\"\u0000*\u0000epage\";s:3:\"117\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0257-8972\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:8:\"LE PRIOL\";s:10:\"\u0000*\u0000aufirst\";s:1:\"A\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:5:{i:0;s:10:\"SIMONOT, L\";i:1;s:10:\"ABADIAS, G\";i:2;s:9:\"GUERIN, P\";i:3;s:13:\"RENAULT, P.-O\";i:4;s:13:\"LE BOURHIS, E\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"SCTEEJ\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:149:\"Proceedings of the 40th International Conference on Metallurgical Coatings and Thin Films, ICMCTF 2013, San Diego, California, April 29 - May 3, 2013\";s:8:\"\u0000*\u0000title\";s:99:\"Real-time curvature and optical spectroscopy monitoring of magnetron-sputtered WTi alloy thin films\";s:8:\"\u0000*\u0000place\";s:9:\"Amsterdam\";s:6:\"\u0000*\u0000pub\";s:8:\"Elsevier\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Europe PubMed Central access
"O:11:\"BaseOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:30:\"10.1016\/j.surfcoat.2013.08.065\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:99:\"Real-time curvature and optical spectroscopy monitoring of magnetron-sputtered WTi alloy thin films\";s:9:\"\u0000*\u0000jtitle\";s:29:\"Surface & coatings technology\";s:9:\"\u0000*\u0000stitle\";s:19:\"Surf. coat. technol\";s:7:\"\u0000*\u0000date\";s:4:\"2013\";s:9:\"\u0000*\u0000volume\";s:3:\"237\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"112\";s:8:\"\u0000*\u0000epage\";s:3:\"117\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0257-8972\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:8:\"LE PRIOL\";s:10:\"\u0000*\u0000aufirst\";s:1:\"A\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:5:{i:0;s:10:\"SIMONOT, L\";i:1;s:10:\"ABADIAS, G\";i:2;s:9:\"GUERIN, P\";i:3;s:13:\"RENAULT, P.-O\";i:4;s:13:\"LE BOURHIS, E\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"SCTEEJ\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:149:\"Proceedings of the 40th International Conference on Metallurgical Coatings and Thin Films, ICMCTF 2013, San Diego, California, April 29 - May 3, 2013\";s:8:\"\u0000*\u0000title\";s:99:\"Real-time curvature and optical spectroscopy monitoring of magnetron-sputtered WTi alloy thin films\";s:8:\"\u0000*\u0000place\";s:9:\"Amsterdam\";s:6:\"\u0000*\u0000pub\";s:8:\"Elsevier\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
Base Search access
"O:12:\"ArXivOpenUrl\":35:{s:10:\"\u0000*\u0000openUrl\";N;s:6:\"\u0000*\u0000fmt\";s:10:\"proceeding\";s:6:\"\u0000*\u0000doi\";s:30:\"10.1016\/j.surfcoat.2013.08.065\";s:6:\"\u0000*\u0000pii\";s:0:\"\";s:7:\"\u0000*\u0000pmid\";s:0:\"\";s:9:\"\u0000*\u0000atitle\";s:99:\"Real-time curvature and optical spectroscopy monitoring of magnetron-sputtered WTi alloy thin films\";s:9:\"\u0000*\u0000jtitle\";s:29:\"Surface & coatings technology\";s:9:\"\u0000*\u0000stitle\";s:19:\"Surf. coat. technol\";s:7:\"\u0000*\u0000date\";s:4:\"2013\";s:9:\"\u0000*\u0000volume\";s:3:\"237\";s:8:\"\u0000*\u0000issue\";s:0:\"\";s:8:\"\u0000*\u0000spage\";s:3:\"112\";s:8:\"\u0000*\u0000epage\";s:3:\"117\";s:8:\"\u0000*\u0000pages\";s:0:\"\";s:7:\"\u0000*\u0000issn\";s:9:\"0257-8972\";s:8:\"\u0000*\u0000eissn\";s:0:\"\";s:9:\"\u0000*\u0000aulast\";s:8:\"LE PRIOL\";s:10:\"\u0000*\u0000aufirst\";s:1:\"A\";s:9:\"\u0000*\u0000auinit\";s:0:\"\";s:10:\"\u0000*\u0000auinitm\";s:0:\"\";s:5:\"\u0000*\u0000au\";a:5:{i:0;s:10:\"SIMONOT, L\";i:1;s:10:\"ABADIAS, G\";i:2;s:9:\"GUERIN, P\";i:3;s:13:\"RENAULT, P.-O\";i:4;s:13:\"LE BOURHIS, E\";}s:9:\"\u0000*\u0000aucorp\";s:0:\"\";s:7:\"\u0000*\u0000isbn\";s:0:\"\";s:8:\"\u0000*\u0000coden\";s:6:\"SCTEEJ\";s:8:\"\u0000*\u0000genre\";s:10:\"proceeding\";s:7:\"\u0000*\u0000part\";s:0:\"\";s:9:\"\u0000*\u0000btitle\";s:149:\"Proceedings of the 40th International Conference on Metallurgical Coatings and Thin Films, ICMCTF 2013, San Diego, California, April 29 - May 3, 2013\";s:8:\"\u0000*\u0000title\";s:99:\"Real-time curvature and optical spectroscopy monitoring of magnetron-sputtered WTi alloy thin films\";s:8:\"\u0000*\u0000place\";s:9:\"Amsterdam\";s:6:\"\u0000*\u0000pub\";s:8:\"Elsevier\";s:10:\"\u0000*\u0000edition\";s:0:\"\";s:9:\"\u0000*\u0000tpages\";s:1:\"6\";s:9:\"\u0000*\u0000series\";s:0:\"\";s:8:\"\u0000*\u0000proxy\";s:30:\"http:\/\/proxyout.inist.fr:8080\/\";s:12:\"\u0000*\u0000integrite\";b:1;}"
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