A Facile Route to Regular and Nonregular Dot Arrays by Integrating Nanoimprint Lithography with Sphere-Forming Block Copolymer Directed Self-Assembly
- Author
- SHUAIGANG XIAO1 ; XIAOMIN YANG1 ; HWU, Justin J1 ; LEE, Kim Y1 ; KUO, David1
[1] Media Research Center, Seagate Technology, 47010 Kato Road, Fremont, California 94538, United States - Source
Journal of polymer science. Part B. Polymer physics. 2014, Vol 52, Num 5, pp 361-367, 7 p
- CODEN
- JPLPAY
- ISSN
- 0887-6266
- Scientific domain
- Polymers, paint and wood industries
- Publisher
- Wiley, Hoboken, NJ
- Publication country
- United States
- Document type
- Article
- Language
- English
- Author keyword
- bit-patterned media block copolymers directed self-assembly nanoimprint resists self-assembly topography
- Keyword (fr)
- Autoassemblage Coercivité Copolymère biséquencé Couche ultramince Disque magnétique Dépôt centrifugation Effet surface Etude expérimentale Fabrication Formation motif Gravure faisceau ionique Gravure ionique réactive Lithographie nanoimpression Matériau enregistrement Mémoire magnétique Nanopoint Recuit Réseau 2 dimensions Siloxane(diméthyl) copolymère Siloxane(diméthyl) polymère Styrène copolymère Topographie surface Autoassemblage dirigé Bit patterned media Réseau nanopoints Transfert motifs
- Keyword (en)
- Self assembly Coercivity Diblock copolymer Ultrathin films Magnetic disk Spin-on coating Surface effect Experimental study Manufacturing Patterning Ion beam etching Reactive ion etching Nanoimprint lithography Recording material Magnetic storage Nanodot Annealing Two dimension network Dimethylsiloxane copolymer Dimethylsiloxane polymer Styrene copolymer Surface topography
- Keyword (es)
- Autoensamble Coercividad Copolímero bisecuencia Disco magnético Efecto superficie Estudio experimental Fabricación Formacíon motivo Grabado haz iónico Grabado iónico reactivo Litografía nanoimpresión Material grabación Memoria magnética Nanopunto Recocido Red 2 dimensiones Siloxano(dimetil) copolímero Siloxano(dimetil) polímero Estireno copolímero
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D03 Electronics / 001D03C Materials
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D10 Polymer industry, paints, wood / 001D10A Technology of polymers / 001D10A04 Machinery and processing / 001D10A04A Plastics / 001D10A04A8 Miscellaneous
- Discipline
- Electronics Polymer industry, paints, wood
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 28271009
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1002/polb.23433 
https://dx.doi.org/10.1002/polb.23433
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