A novel tri-axis MEMS gyroscope with in-plane tetra-pendulum proof masses and enhanced sensitive springs
- Author
- WANG, M. C1 2 ; JIAO, J. W1 ; YAN, P. L1 ; MI, B. W1 ; QIN, S1 2
[1] State Key Laboratory of Transducer Technology, Science and Technology on Microsystem Laboratory, Shanghai Institute of Microsystem and Information Technology, CAS, Shanghai, China
[2] University of Chinese Academy of Sciences, CAS, Beijing, China - Source
Journal of micromechanics and microengineering (Print). 2014, Vol 24, Num 4 ; 045002.1-045002.10 ; ref : 20 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Actionneur inertiel Angle inclinaison Dispositif microélectromécanique Fabrication Gyroscope Microusinage Modélisation Oscillation Prototype Torsion Variation angulaire
- Keyword (en)
- Proof mass actuator Inclination Microelectromechanical device Fabrication Gyroscopes Micromachining Modelling Oscillations Prototype Torsion Angular variation
- Keyword (es)
- Masa efectiva Dispositivo microelectromecánico Prototipo Variación angular
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 28384929
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/24/4/045002 
https://dx.doi.org/10.1088/0960-1317/24/4/045002
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