Antibacterial and barrier properties of oriented polymer films with ZnO thin films applied with atomic layer deposition at low temperatures
- Autor
- VÄHÄ-NISSI, Mika1 ; PITKÄNEN, Marja1 ; KARPPINEN, Maarit2 ; HARLIN, Ali1 ; SALO, Erkki1 ; KENTTÄ, Eija1 ; TANSKANEN, Anne2 ; SAJAVAARA, Timo3 ; PUTKONEN, Matti1 ; SIEVÄNEN, Jenni1 ; SNECK, Asko1 ; RÄTTÖ, Marjaana1
[1] VTT Technical Research Centre of Finland, P.O. Box 1000, 02044, VTT, Finland
[2] Aalto University, School of Chemical Technology, Department of Chemistry, Laboratory of Inorganic Chemistry, P.O. Box 16100, 00076 Aalto, Finland
[3] University of Jyväskylä, Department of Physics, P.O. Box 35, 40014 Jyväskylä, Finland - Fuente
Thin solid films. 2014, Vol 562, pp 331-337, 7 p ; ref : 45 ref
- CODEN
- THSFAP
- ISSN
- 0040-6090
- Campo Científico
- Crystallography; Metallurgy, welding; Condensed state physics
- Editor
- Elsevier, Amsterdam
- País de la publicación
- Netherlands
- Tipo de documento
- Article
- Idioma
- English
- Palabra clave de autor
- Aluminum oxide Antibacterial Atomic layer deposition Barrier Growth Zinc oxide
- Palabra clave (fr)
- Acide carboxylique Antibactérien Bactérie Composition chimique Composition phase Composé du zinc Couche mince Croissance cristalline en phase vapeur Diffusion(transport) Film polymère Mécanisme croissance Méthode couche atomique Oxyde de zinc Pastille électronique Précurseur 6835F 6855A 6855N 8115K Al2O3 Substrat film polymère Substrat silicium ZnO
- Palabra clave (in)
- Carboxylic acids Germicides Bacteria Chemical composition Phase composition Zinc compounds Thin films Crystal growth from vapors Diffusion Polymer films Growth mechanism Atomic layer method Zinc oxide Wafers Precursor
- Palabra clave (es)
- Composición fase Mecanismo crecimiento Método capa atómica Zinc óxido
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H35 Solid surfaces and solid-solid interfaces / 001B60H35F Diffusion; interface formation
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55N Composition and phase identification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15A Theory and models of film growth
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15K Vapor phase epitaxy; growth from vapor phase
- Disciplina
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 28538638
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.tsf.2014.03.068 
https://dx.doi.org/10.1016/j.tsf.2014.03.068
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