Deflection of threading dislocations in patterned 4H-SiC epitaxial growth
- Autor
- TSUCHIDA, Hidekazu1 ; TAKANASHI, Ryosuke1 ; KAMATA, Isaho1 ; HOSHINO, Norihiro1 ; MAKINO, Emi2 ; KOJIMA, Jun2
[1] Central Research Institute of Electric Power Industry (CRIEPI), 2-6-1 Nagasaka, Yokosuka, Kanagawa 240-0196, Japan
[2] DENSO Corporation, 500-1 Minamiyama, Komenoki, Nisshin, Aichi, Japan - Fuente
Journal of crystal growth. 2014, Vol 402, pp 260-266, 7 p ; ref : 29 ref
- CODEN
- JCRGAE
- ISSN
- 0022-0248
- Campo Científico
- Crystallography; Geology; Metallurgy, welding
- Editor
- Elsevier, Amsterdam
- País de la publicación
- Netherlands
- Tipo de documento
- Article
- Idioma
- English
- Palabra clave de autor
- A1. Characterization A1. Line defects A3. Vapor phase epitaxy B1. Silicon carbide B2. Semiconducting materials
- Palabra clave (fr)
- Carbure de silicium Couche épitaxique Dislocation filetée Epitaxie phase vapeur Gravure sèche Microscopie optique Morphologie Mécanisme croissance Rayonnement synchrotron Topographie RX 6172L 8110A 8115K
- Palabra clave (in)
- Silicon carbide Epitaxial layers Threading dislocation VPE Dry etching Optical microscopy Morphology Growth mechanism Synchrotron radiation X-ray topography
- Palabra clave (es)
- Silicio carburo Dislocación aterrajada Grabado seco Mecanismo crecimiento
- Clasificación
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60A Structure of solids and liquids; crystallography / 001B60A72 Defects and impurities in crystals; microstructure / 001B60A72L Linear defects: dislocations, disclinations
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A10 Methods of crystal growth; physics of crystal growth / 001B80A10A Theory and models of crystal growth; physics of crystal growth, crystal morphology and orientation
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15K Vapor phase epitaxy; growth from vapor phase
- Disciplina
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Procedencia
- Inist-CNRS
- Base de datos
- PASCAL
- Identificador INIST
- 28664721
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.jcrysgro.2014.06.034 
https://dx.doi.org/10.1016/j.jcrysgro.2014.06.034
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