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Co-doping effects of Mg and Be on properties of ZnMgBeGaO UV-range transparent conductive oxide films prepared by RF magnetron sputtering

Author
PARK, Jang-Ho1 ; HOANG BA CUONG1 ; JEONG, Sang-Hun2 ; LEE, Byung-Teak1
[1] Photonic and Electronic Thin Film Laboratory, Department of Materials Science and Engineering, Chonnam National University, 300, Yong-bong dong, Gwangju 500-757, Korea, Republic of
[2] Gwangju Center, Korea Basic Science Institute, 300, Yong-bong dong, Gwangju 500-757, Korea, Republic of
Source

Journal of alloys and compounds. 2014, Vol 615, pp 126-130, 5 p ; ref : 23 ref

ISSN
0925-8388
Scientific domain
Inorganic chemistry; Crystallography; Metallurgy, welding; Condensed state physics
Publisher
Elsevier, Kidlington
Publication country
United Kingdom
Document type
Article
Language
English
Author keyword
Be and Mg co-doping Post growth annealing RF magnetron sputtering Transparent conducting oxide Zn0.96―x―yMgxBeyGa0.04O film
Keyword (fr)
Addition béryllium Addition magnésium Bande interdite Codopage Coefficient absorption Concentration impureté Conductivité électrique Densité porteur charge Diffraction RX Oxyde Pulvérisation haute fréquence Rayon ionique Recuit
Keyword (en)
Beryllium additions Magnesium additions Energy gap Codoping Absorption coefficients Impurity density Electrical conductivity Carrier density XRD Oxides Radiofrequency sputtering Ionic radius Annealing
Keyword (es)
Codrogado Concentración impureza Pulverización alta frecuencia Radio iónico
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C50 Electronic transport phenomena in thin films and low-dimensional structures

Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70H Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation / 001B70H66 Optical properties of specific thin films

Pascal
001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering

Discipline
Physics and materials science Physics of condensed state : electronic structure, electrical, magnetic and optical properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
28763649

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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