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Study of wet etching thin films of indium tin oxide in oxalic acid by monitoring the resistance

Author
MAMMANA, Suelene S1 ; GREATTI, Alessandra1 ; LUIZ, Francis H1 ; DA COSTA, Francisca I1 ; MAMMANA, Alaide P1 ; CALLIGARIS, Guilherme A2 ; CARDOSO, Lisandro P2 ; MAMMANA, Carlos I. Z1 ; DEN ENGELSEN, Daniel1
[1] Brazilian Association for Informatics - ABINFO, Rua Deusdete Martins Gomes 163, CEP 13084-723, Campinas, SP, Brazil
[2] Institute of Physics Gleb Wataghin, State University of Campinas-UNICAMP, CEP 13083-859, Campinas, SP, Brazil
Source

Thin solid films. 2014, Vol 567, pp 20-31, 12 p ; ref : 36 ref

CODEN
THSFAP
ISSN
0040-6090
Scientific domain
Crystallography; Metallurgy, welding; Condensed state physics
Publisher
Elsevier, Amsterdam
Publication country
Netherlands
Document type
Article
Language
English
Author keyword
Activation energy Electrical resistance Etch rate Morphology Selective etching X-ray reflectivity
Keyword (fr)
Acide oxalique Chlorure Couche mince Energie activation Gravure sélective Incidence rasante Microscopie électronique balayage Morphologie Oxyde d'indium Oxyde d'étain Porosité Rugosité Réflexion RX Résistance contact Résistivité électrique Solution aqueuse Vitesse gravure 6855J 7340C In2O3
Keyword (en)
Oxalic acid Chlorides Thin films Activation energy Selective etching Grazing incidence Scanning electron microscopy Morphology Indium oxide Tin oxide Porosity Roughness X-ray reflection Contact resistance Electric resistivity Aqueous solutions Etching rate
Keyword (es)
Grabado selectivo Incidencia rasante Indio óxido Estaño óxido Velocidad grabado
Classification
Pascal
001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness

Pascal
001 Exact sciences and technology / 001B Physics / 001B70 Condensed matter: electronic structure, electrical, magnetic, and optical properties / 001B70C Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures / 001B70C40 Electronic transport in interface structures / 001B70C40C Contact resistance, contact potential

Discipline
Physics of condensed state : electronic structure, electrical, magnetic and optical properties Physics of condensed state : structure, mechanical and thermal properties
Origin
Inist-CNRS
Database
PASCAL
INIST identifier
28771907

Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS

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