Design, simulation, fabrication and characterization of nano-scaled acceleration grids
- Author
- KALLIS, K. T1 ; DIETZ, D1 ; SUBASI, E2 ; MÜLLER, M. R1 3 ; KONTIS, C4 ; ZIMMER, C. M1
[1] Micro- and Nanotechnologies Group, Faculty of Electrical Engineering and Information Technology, TU Dortmund University, Dortmund 44227, Germany
[2] Chair for Electronic Materials and Nanoelectronics, Faculty for Electrical Engineering and Information Sciences, Ruhr University, Bochum 44780, Germany
[3] Institute of Semiconductor Electronics, RWTH Aachen University, 52074 Aachen, Germany
[4] Intelligent Microsystems Institute, Faculty of Electrical Engineering and Information Technology, TU Dortmund University, Dortmund 44227, Germany - Issue title
- Nano Fabrication 2013
- Author (monograph)
- FOBELETS, Kristel (Editor)1 ; UTKE, Ivo (Editor)2
[1] Department of Electrical & Electronic Engineering, Imperial College of Science, Technology & Medicine, Exhibition Rd, London SW7 2BT, United Kingdom
[2] Empa, Swiss Federal Laboratories for Materials Science and Technology, Feuerwerkerstrasse 39, 3602 Thun, Switzerland - Source
Microelectronic engineering. 2014, Vol 121, pp 118-121, 4 p ; ref : 8 ref
- CODEN
- MIENEF
- ISSN
- 0167-9317
- Scientific domain
- Electronics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Author keyword
- Acceleration grid Electrical lens Micro-machined electron-emitter Vacuum through scaling
- Keyword (fr)
- Effet dimensionnel Grille Mesure électrique Microusinage Optimisation Problème agencement Processus fabrication Tension amorçage Accélérateur électron
- Keyword (en)
- Size effect Grids Electrical measurement Micromachining Optimization Layout problem Production process Breakdown voltage Electron accelerators
- Keyword (es)
- Medida eléctrica Problema disposición Proceso fabricación Voltaje perforación Acelerador de electrónes
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B20 Nuclear physics / 001B20I Experimental methods and instrumentation for elementary-particle and nuclear physics / 001B20I25 Particle sources and targets / 001B20I25B Electron sources
- Discipline
- Nuclear physics
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 28775589
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/j.mee.2014.04.036 
https://dx.doi.org/10.1016/j.mee.2014.04.036
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