IR-drying of photoresists: experimental and theoretical consideration of drying kinetics of mono- and multi-layered coatings
- Author
- SCHÖNFELD, M1 ; SCHUBERT, S1 ; SAUPE, J1 ; GRIMM, J1
[1] Department of MEMS, University of Applied Sciences Zwickau (UASZ), 08056 Zwickau, Germany - Conference title
- The 10th International Workshop on High Aspect Ration Micro and Nanosystem Technologies (HARMNST), Berlin, April 21-24, 2013
- Conference name
- HARMNST 2013 International Workshop on High Aspect Ration Micro and Nanosystem Technologies (Berlin 2013-04-22)
- Author (monograph)
- Micro resist technology GmbH, Berlin, Germany (Organiser of meeting)
- Source
Microsystem technologies. 2014, Vol 20, Num 10-11, pp 1803-1806, 4 p ; ref : 1/4 p
- ISSN
- 0946-7076
- Scientific domain
- Electronics; Mechanical engineering; Metrology and instrumentation
- Publisher
- Springer, Heidelberg
- Publication country
- Germany
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Cinétique Coefficient diffusion Loi Fick Modélisation Multicouche Photorésist Revêtement Séchage IR
- Keyword (en)
- Kinetics Diffusion coefficient Fick laws Modeling Multiple layer Photoresist Coatings Infrared drying
- Keyword (es)
- Cinética Coeficiente difusión Modelización Capa múltiple Fotorresistencia Revestimiento Secado IR
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D10 Polymer industry, paints, wood / 001D10A Technology of polymers / 001D10A08 Application fields
- Discipline
- Polymer industry, paints, wood
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 28816314
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/s00542-013-1934-5 
https://dx.doi.org/10.1007/s00542-013-1934-5
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