Amorphous regions and crystallization behavior of rf-sputtered films in the B2O3-Na2O-Al2O3 system
- Author
- WAKASUGI, T; OTA, R; NOZAWA, Y; FUKUNAGA, J
Kyoto inst. technology, dep. chemistry materials technology, Sakyo-ku, Kyoto 606, Japan - Source
Journal of non-crystalline solids. 1995, Vol 191, Num 1-2, pp 238-247 ; ref : 13 ref
- CODEN
- JNCSBJ
- ISSN
- 0022-3093
- Scientific domain
- Crystallography; Chemical industry parachemical industry; Metallurgy, welding; Condensed state physics
- Publisher
- Elsevier, Amsterdam
- Publication country
- Netherlands
- Document type
- Article
- Language
- English
- Keyword (fr)
- Aluminium oxyde Bore oxyde Cristallisation Etat amorphe Etude expérimentale Film Formation verre Préparation chimique Pulvérisation haute fréquence Sodium oxyde Stabilité thermique Système ternaire Verre Al B Na O Système Al2O3 B2O3 Na2O
- Keyword (en)
- Aluminium oxides Boron oxides Crystallization Amorphous state Experimental study Films Glass formation Chemical preparation Radiofrequency sputtering Sodium oxides Thermal stability Ternary systems Glass
- Keyword (es)
- Pulverización alta frecuencia Estabilidad térmica
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B60 Condensed matter: structure, mechanical and thermal properties / 001B60H Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) / 001B60H55 Thin film structure and morphology / 001B60H55J Structure and morphology; thickness
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15C Deposition by sputtering
- Discipline
- Physics and materials science Physics of condensed state : structure, mechanical and thermal properties
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2890384
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0022-3093(95)00282-0 
https://dx.doi.org/10.1016/0022-3093(95)00282-0
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