EPMA sputter depth profiling : a new technique for quantitative in-depth analysis of layered structures
- Author
- KARDUCK, P1 ; VON RICHTHOFEN, A
[1] Rheinisch-Westfälische tech. Hochschule Aachen, GFE, Gemeinschaftslab. Electronenmikroskopie, 52056 Aachen, Germany - Source
Microscopy microanalysis microstructures (Les Ulis). 1995, Vol 6, Num 4, pp 421-432 ; ref : 16 ref
- ISSN
- 1154-2799
- Scientific domain
- Crystallography; Metallurgy, welding; Condensed state physics
- Publisher
- Editions de physique, Les Ulis
- Publication country
- France
- Document type
- Article
- Language
- English
- Keyword (fr)
- Couche mince Couche Etude expérimentale Etude théorique Microanalyse Microscopie électronique Profil profondeur Rayon X SEM Sonde électronique Structure sandwich 0778 0785N
- Keyword (en)
- Thin films Layers Experimental study Theoretical study Microanalysis Electron microscopy Depth profiles X radiation SEM Electron probes Sandwich structures
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G78 Electron, positron and ion microscopes, electron diffractometers and related techniques
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G85 X- and γ-ray instruments and techniques / 001B00G85N X- and γ-ray spectrometers
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2896382
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1051/mmm:1995132 
https://dx.doi.org/10.1051/mmm:1995132
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