Preparation of fine amorphous silicon nitride powder in the system SiH4-Ar-NH3
- Author
- SAHU, S1 ; KAVECKY, S; SZEPVÖLGYI, J
[1] Slovak acad. sci., inst. inorganic chemistry, 842 36 Bratislava, Slovakia - Source
Journal of the European Ceramic Society. 1995, Vol 15, Num 11, pp 1071-1077 ; ref : 11 ref
- ISSN
- 0955-2219
- Scientific domain
- Chemical industry parachemical industry
- Publisher
- Elsevier, Oxford
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Ammoniac Analyse chimique Argon Composition chimique Dimension particule Effet milieu Etude expérimentale Microscopie électronique balayage Poudre fine Poudre Préparation Silane Silicium Nitrure Spectrométrie photoélectron RX Ar NH3 Si3N4 SiH4
- Keyword (en)
- Ammonia Chemical analysis Argon Chemical composition Particle size Medium effect Experimental study Scanning electron microscopy Fine powder Powders Preparation Silanes Silicon Nitrides X ray photoelectron spectroscopy
- Keyword (es)
- Composición química Dimensión partícula Efecto medio Estudio experimental Polvo fino Preparación
- Classification
- Pascal
- 001 Exact sciences and technology / 001C Chemistry / 001C01 General and physical chemistry / 001C01J Colloidal state and disperse state / 001C01J07 Powders
- Discipline
- General chemistry and physical chemistry
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2902693
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1016/0955-2219(95)00091-8 
https://dx.doi.org/10.1016/0955-2219(95)00091-8
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