A study toward the development of an electromechanical poly(vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) buckling membrane actuator
- Author
- ENGEL, Leeya1 ; KRUK, Shahar1 ; SHKLOVSKY, Jenny1 ; SHACHAM-DIAMAND, Yosi1 ; KRYLOV, Slava2
[1] School of Electrical Engineering, Faculty of Engineering, Tel Aviv University, Tel Aviv 69978, Israel
[2] School of Mechanical Engineering, Faculty of Engineering, Tel Aviv University, Tel Aviv 69978, Israel - Source
Journal of micromechanics and microengineering (Print). 2014, Vol 24, Num 12 ; 125027.1-125027.8 ; ref : 27 ref
- ISSN
- 0960-1317
- Scientific domain
- Electronics; Mechanical engineering
- Publisher
- Institute of Physics, Bristol
- Publication country
- United Kingdom
- Document type
- Article
- Language
- English
- Keyword (fr)
- Actionneur Condensateur Couche mince Dispositif microélectromécanique Ethylène dérivé polymère Flambage Fréquence résonance Membrane polymère Microactionneur Module Young Propriété diélectrique Propriété électromécanique Relaxeur Transparence Vinylidène fluorure polymère Lithographie douce
- Keyword (en)
- Actuators Capacitors Thin films Microelectromechanical device Ethylene derivative polymer Buckling Resonance frequency Polymeric membrane Microactuators Young modulus Dielectric properties Electromechanical properties Relaxor Transparency Vinylidene fluoride polymer Soft lithography
- Keyword (es)
- Dispositivo microelectromecánico Etileno derivado polímero Frecuencia resonancia Membrana polímero Propiedad electromecánica Vinilideno fluoruro polímero Litografía blanda
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G07 General equipment and techniques / 001B00G07M Transducers
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B00 General / 001B00G Instruments, apparatus, components and techniques common to several branches of physics and astronomy / 001B00G10 Mechanical instruments, equipment and techniques / 001B00G10C Micromechanical devices and systems
- Discipline
- Metrology
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 29034606
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1088/0960-1317/24/12/125027 
https://dx.doi.org/10.1088/0960-1317/24/12/125027
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