A new analytical solution for the load-deflection of square membranes
- Author
- MAIER-SCHNEIDER, D; MAIBACH, J; OBERMEIER, E
Tech. univ. Berlin, dep. electrical eng., 13355 Berlin, Germany - Source
Journal of microelectromechanical systems. 1995, Vol 4, Num 4, pp 238-241 ; ref : 8 ref
- ISSN
- 1057-7157
- Scientific domain
- Electronics; Mechanics acoustics; Physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Article
- Language
- English
- Keyword (fr)
- Déflexion Flèche Membrane Miniaturisation Mécanique précision Méthode analytique Pression Silicium nitrure
- Keyword (en)
- Deflection Deflection(deformation) Membrane Miniaturization Precision engineering Analytical method Pressure Silicon nitride
- Keyword (es)
- Deflección Torcedura Membrana Miniaturización Mecánica precisión Método analítico Presión Silicio nitruro
- Classification
- Pascal
- 001 Exact sciences and technology / 001D Applied sciences / 001D12 Mechanical engineering. Machine design / 001D12I Precision engineering, watch making
- Discipline
- Mechanical engineering. Mechanical construction. Handling
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2939283
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1109/84.475551 
https://dx.doi.org/10.1109/84.475551
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