Laser processing of BN and AlN films
- Author
- NARAYAN, J; WU, H; VISPUTE, R. D
North Carolina State univ., dep. materials sci. eng., Raleigh NC 27695-7916, United States - Conference title
- Ion beam and laser processing of materials. Conference
- Conference name
- Ion beam and laser processing of materials. Conference
- Author (monograph)
- SINGH, Rajiv (Editor)1 ; HOLLAND, Wayne (Editor)
Minerals, Metals and Materials Society ; Thin films and Interfaces Committee, United States (Funder/Sponsor)
[1] Univ. Florida, United States - Source
Journal of electronic materials. 1996, Vol 25, Num 1, pp 143-149 ; ref : 15 ref
- CODEN
- JECMA5
- ISSN
- 0361-5235
- Scientific domain
- Crystallography; Electronics; Metallurgy, welding; Condensed state physics
- Publisher
- Institute of Electrical and Electronics Engineers, New York, NY
- Publication country
- United States
- Document type
- Conference Paper
- Language
- English
- Keyword (fr)
- Aluminium nitrure Bore nitrure Caractérisation Composé binaire Couche épitaxique Croissance cristalline en phase vapeur Croissance film Etude expérimentale Evaporation Laser pulsé Perfection cristalline Rayonnement laser Réseau cubique Réseau hexagonal Al N AlN B N BN Composé minéral
- Keyword (en)
- Aluminium nitrides Boron nitrides Characterization Binary compounds Epitaxial layers Crystal growth from vapors Film growth Experimental study Evaporation Pulsed lasers Crystal perfection Laser radiation Cubic lattices Hexagonal lattices Inorganic compounds
- Keyword (es)
- Caracterización Perfección cristalina
- Classification
- Pascal
- 001 Exact sciences and technology / 001B Physics / 001B80 Cross-disciplinary physics: materials science; rheology / 001B80A Materials science / 001B80A15 Methods of deposition of films and coatings; film growth and epitaxy / 001B80A15F Laser deposition
- Discipline
- Physics and materials science
- Origin
- Inist-CNRS
- Database
- PASCAL
- INIST identifier
- 2968890
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
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DOI
10.1007/BF02666188 
https://dx.doi.org/10.1007/BF02666188
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